Demonstration of wafer-level integrated permanent bias micromagnets for magnetic field sensors

Inhalt:
For the demonstration of magnetic biasing with wafer-level integrated permanent magnets, a Hall sensor is equipped with a back bias magnet by directly integrating the magnet into the silicon substrate. For this purpose, a powder-based micro-fabrication technique, called PowderMEMS, is utilized. The plausibility of the approach to equip magnetic sensors with substrate-integrated bias magnets is investigated by simulation and measurement of the rotation of a soft magnetic gear wheel, representing a typical biased sensor application. In addition, shaping of the magnetic field distribution using customized magnet geometries is performed and investigated.