Versatile Charge Coupled Field Effect Transistor Platform for Hybrid Gas Sensors: Nitrogen Dioxide and Ammonia Detection

Konferenz: Mikrosystemtechnik Kongress 2005 - Mikrosystemtechnik Kongress 2005
10.10.2005 - 12.10.2005 in Munich, Germany

Tagungsband: Mikrosystemtechnik Kongress 2005

Seiten: 4Sprache: EnglischTyp: PDF

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Oprea, A.; Weimar, U. (Institute for Physical and Theoretical Chemistry, Auf der Morgenstelle 15, 72076 Tübingen, Germany)
Frerichs, H.-P.; Wilbertz, Ch.; Lehmann, M. (Micronas GmbH, Hans-Bunte-Str. 19, 79108 Freiburg, Germany)

Versatile charge coupled field effect transistors (CC-FET) for gas sensor were realized and tested in suspended gate (SG) hybrid (H) sensor structures. Thin organic and inorganic films have been incorporated in the SG as sensing elements. The sensors show good functionality and gas sensitivity at room temperature. The dissipated power during exploitation does not exceed 1mW.