Grid-Based Discrete Spinning Current Method for the Extraction of Two Stresses and the Hall Voltage from Planar Four-Contact Sensors

Konferenz: Mikrosystemtechnik Kongress 2005 - Mikrosystemtechnik Kongress 2005
10.10.2005 - 12.10.2005 in Munich, Germany

Tagungsband: Mikrosystemtechnik Kongress 2005

Seiten: 4Sprache: EnglischTyp: PDF

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Bartholomeyczik, J.; Doelle, M.; Ruther, P.; Paul, O. (IMTEK – Microsystem Materials Laboratory, University of Freiburg, 79110 Freiburg, Germany)

An implementation-friendly method to extract stress values and the Hall voltage from planar sensors with four peripheral contacts is described. It is based on the well-known continuous spinning current method where the current injected into the device is continuously rotated with constant amplitude by appropriate superposition of two orthogonal currents. In the grid-based discrete spinning current method, the orthogonal currents each take the levels -I0 , 0, and +I0 . The resulting eight effective current vectors lie on a grid. Their non-constant amplitudes simplify the Fourier analysis supplying conclusions about two stress components from the pseudo-Hall signals orthogonal to the current directions and the Hall voltage.