Laser Processing of Materials in Micro System Technology

Konferenz: Mikrosystemtechnik Kongress 2005 - Mikrosystemtechnik Kongress 2005
10.10.2005 - 12.10.2005 in Munich, Germany

Tagungsband: Mikrosystemtechnik Kongress 2005

Seiten: 4Sprache: EnglischTyp: PDF

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Schoonderbeek, A.; Bärsch, N.; Klug, U.; Otte, F.; Siegel, F.; Stute, U. (Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany)

Lasers are used as a tool in many Micro System Technology production processes. This paper gives an impression of laser micro-machining in this field. Both, theoretical backgrounds and applications are discussed, with a concentration on laser processing of silicon. Different types of lasers, used for the applications mentioned in this paper, are compared with each other. These types of lasers are characterized by the pulse duration, which is respectively in the nano-, pico- and femtosecond range.