State of the art and trends in functional integration for AC Applications
Konferenz: CIPS 2006 - 4th International Conference on Integrated Power Systems
07.06.2006 - 09.06.2006 in Naples, Italy
Tagungsband: CIPS 2006
Seiten: 6Sprache: EnglischTyp: PDFPersönliche VDE-Mitglieder erhalten auf diesen Artikel 10% Rabatt
Sanchez, J.-L.; Austin, P.; Breil, M.; Laur, J.-P. (LAAS-CNRS, 7, Avenue du colonel Roche, 31077 Toulouse Cedex, France)
Crébier, J.-C.; Aubard, L.; Schaeffer, C. (LEG, Domaine universitaire, BP 46, 38402 St Martin d'Hères, France)
In this paper, we present the evolution of functional integration in monolithic silicon AC switches for power electronic application purposes. It involves three levels of design, concepts and technologies. The first one is the power switch itself and its own technological process. The second one is the electronic environment and the technology and compatible specific steps supporting complex functions. The last one is the thermo-mechanical and electrical environment and its specific technological but also design issues. The paper will detail evolution and trends in the two first research fields. The first part will present the device core structure and resulting integrated concepts that can be added. The second part of the paper will focus of flexible technological issues. This flexible technological process is based on a succession of basic technological steps corresponding to the fabrication of IGBT devices and compatible specific steps supporting more complex functions.