Planar Micro Flame Ionisation Detector

Inhalt:
Miniaturization of the Flame Ionisation Detector by MEMS technology (muFID) is expected to increase its use, because of reduced oxyhydrogen consumption, which loosens safety precautions and makes portable applications possible. In contrast to a former muFID design, the currently presented planar muFID is designed to prevent environmental air from entering the system and thereby deteriorating the measurement signal. After fabrication, measurements confirmed the nozzle design of the planar muFID, but appointed leak currents to be the main problem in detecting organic compounds. Therefore, a redesign is proposed, in which leak currents are bypassed through an integrated guard, past the picoammeter, which then only measures the ionisation current.