Batch Fabrication Methods for Active Polymer Microsystems

Konferenz: Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components
09.04.2008 - 10.04.2008 in Barcelona, Spain

Tagungsband: Smart Systems Integration 2008

Seiten: 3Sprache: EnglischTyp: PDF

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Grund, Thomas; Kohl, Manfred (Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Postfach 3640, 76021 Karlsruhe, Germany)

A batch compatible process flow to overcome the costly piece by piece assembly of hybrid microsystems is shown. As demonstrator device, a shape memory alloy (SMA) actuated polymer microvalve is introduced. The valve concept, fabrication technologies and device characteristics are discussed.