Electromagnetic inertial microgenerators for vibrational energy scavenging: Implementation of a Si technology based modular process for optimised devices

Konferenz: Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components
09.04.2008 - 10.04.2008 in Barcelona, Spain

Tagungsband: Smart Systems Integration 2008

Seiten: 8Sprache: EnglischTyp: PDF

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Fondevilla, Núria; Serre, Christophe; Martínez, Susanna; Pérez-Rodríguez, Alejandro; Morante, Joan Ramón (EME/CERMAE/IN2UB, Departament d’Electrònica. Universitat de Barcelona, C. Martí i Franquès 1, 08028 Barcelona, Spain)
Martincic, Emile (IEF, Université Paris-Sud-XI, 91405 Orsay, France)
Montserrat, Josep; Jaume Esteve (Centre Nacional de Microelectrònica CNM-CSIC, Campus UAB, 08193 Bellaterra, Spain)

Electromagnetic (em) inertial microgenerators are an interesting alternative to batteries for powering of advanced autonomous microsystems. These devices are well suited for harvesting of mechanical energy from vibrations induced by operating machines. The fabrication of these devices has been made with a Si technology based modular process where the em converter and the resonator are micromachined separately. The data obtained show the ability of these prototypes to generate power levels in the range of 50 muW’s and output voltages in the range of hundreds of mV.