A 5-bit K-Band MEMS Phase Shifter in a 1-Level Plastic Package

Konferenz: Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components
09.04.2008 - 10.04.2008 in Barcelona, Spain

Tagungsband: Smart Systems Integration 2008

Seiten: 7Sprache: EnglischTyp: PDF

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Bastioli, S.; Farinelli, P.; Ocera, A.; Sorrentino, R. (University of Perugia, DIEI, Via G. Duranti 93, 06125 Perugia, Italy)
Maggio, F. Di; Pomona, I.; Russo, M. (Selex Communications Spa, Via Sidney Sonnino, 6 - 95045 Misterbianco (CT) , Italy)
Giacomozzi, F.; Margesin, B. (Fondazione Bruno Kessler (FBK), Via Sommarive 90,09100 Povo (Tn), Italy)

Microwave phase shifters are basic components used in a large variety of communication and radar systems, microwave instrumentation, and industrial applications. As commercial and military systems increasingly move towards smaller and high performance antenna systems, MEMS technology can be applied to develop electronically reprogrammable phase shifters with low-power consumption, low loss, and excellent linearity. This paper presents the design of a compact 5-bit K-band MEMS phase shifter to be used in reconfigurable telecommunication systems. The phase shifter is being manufactured on high resistivity silicon substrate by using the well-established FBK MEMS process. The electro-magnetic design of the 5-bit phase shifter is presented in Section 2. A very low cost plastic package has been also developed and it is shown in Section 3.