Ultra High Voltage High Current Probe for Power Device Testing
Konferenz: PCIM Europe 2014 - International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management
20.05.2014 - 22.05.2014 in Nürnberg, Deutschland
Tagungsband: PCIM Europe 2014
Seiten: 8Sprache: EnglischTyp: PDF
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Autoren:
Negishi, Kazuki (Cascade Microtech, Inc. USA)
Inhalt:
On-wafer power device probing is a very challenging task, which requires probes that can endure high-current and high-voltage conditions, minimize pad damage and contact resistance on the DUT pads, and achieve over-temperature probing. Cascade Microtech recently developed a 10 kV / 300 A probe for on-wafer power device probing.