Field Stop Trench IGBT Process Parameter Calibration for Advanced Predictive Prototyping

Inhalt:
This paper advances the state of the art through a first time implementation of a multi-stage optimizer procedure within the Synopsis Sentaurus TCAD environment to achieve precise capacitance calibration between a real and a simulated Field Stop Trench IGBT. The methodical approach is detailed, starting from a raw, non calibrated process to the novel optimizer results. The simulations are compared to measurements of the real device. In addition, an analytic model that governs the theory and aids the modeling of capacitances is derived.