Micro Linear Ultrasonic Motor with a Cuboid Stator with Length 2.2 mm

Inhalt:
We propose a micro linear ultrasonic motor, which is one of the smallest linear actuators that can generate practical force. The size of the prototype stator with piezoelectric elements measures 2.6 mm in height, 2.6 mm in width, and 2.2 mm in depth (the length in slider travel direction). There is a through hole of 1.4 mm in diameter at the stator center, and the slider inserted into the hole moves back and forth when voltages are applied to the piezoelectric elements. The motor thrust force has been improved to over 10 mN by optimizing the preload between the stator and slider experimentally. Experiments clarify the output characteristics in response to the input voltages. Finally, a maximum thrust force of 20 mN has been obtained at applied voltages with an amplitude of 150 Vp-p.