Design and Control of Integrated Isolator Featuring MR Damper for Ultra-precision Stage

Konferenz: ACTUATOR 2018 - 16th International Conference on New Actuators
25.06.2018 - 27.06.2018 in Bremen, Deutschland

Tagungsband: ACTUATOR 2018

Seiten: 4Sprache: EnglischTyp: PDF

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Oh, J. S. (Kongju National University, Cheonan, South Korea)
Sohn, J. W. (Kumoh National Institute of Technology, Gumi, South Korea)
Choi, S.-B. (Inha University, Incheon, South Korea)

In this paper, the dynamic model of ultra-precision stage is analysed and MR (magnetorheological) damper is proposed to attenuate the vibration of stage. The dynamic behaviour induced from vibration of the precision stage is important for production quality. So, the semi-active control method which offers a desirable performance without requiring large power source and space had been proposed. In order to investigate the transient vibration characteristics, the dynamic behaviour of the stage according the stage mass movements are analysed. And then, the dynamic model of ultra-precision stage is derived and its effectiveness is verified by experiment. MR damper is designed and the damping force characteristics of MR damper are analysed by experiment. After nonlinear damping force model is constructed and damping force compensator based on derived model is formulated. In order to attenuate the vibration of the ultra-precision stage, skyhook controller with compensator is designed. Vibration control performance of ultra-precision stage featuring MR damper is evaluated.