Sensor Array and Algorithms for Current Control in a 6-DOF Magnetic Levitation Actuator

Konferenz: ACTUATOR 2018 - 16th International Conference on New Actuators
25.06.2018 - 27.06.2018 in Bremen, Deutschland

Tagungsband: ACTUATOR 2018

Seiten: 4Sprache: EnglischTyp: PDF

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Goos, A.; Gloess, R. (Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany)

The 6 degrees of freedom magnetic levitation technology can be used for high-precision positioning tasks and it has the advantage of no abrasion and particle generation during all the time over long term operation. The paper describes a new sensor configuration and mathematical algorithms for the initialization routines of a 6-DOF magnetic levitation stage. The technology is designed to prevent any abrasion during start sequence of the levitation stage. The sequence starts to find the position and rotation of the stage with 16 hall elements. After finding position the basic current distribution is loaded from a lookup table. The values of the table are calculated offline via optimization and contain the current distribution of all 24-coil arrays. These distribution guarantees the decoupling of the forces and torques, which is necessary for a robust control. It is also the basic method to configure the driver’s current for the 24-coil arrays.