Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale

Konferenz: ACTUATOR 2018 - 16th International Conference on New Actuators
25.06.2018 - 27.06.2018 in Bremen, Deutschland

Tagungsband: ACTUATOR 2018

Seiten: 4Sprache: EnglischTyp: PDF

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Straka, L.; Klimsa, L.; Kopecek, J.; Heczko, O. (Institute of Physics of the Czech Academy of Sciences, Prague, Czech Republic)
Musiienko, D.; Ullakko, K. (Lappeenranta University of Technology, Savonlinna, Finland)

Magnetic shape memory alloys are promising candidates for actuation on microscale. We investigate the possibility of using focused Xe-ion (as an alternative to Ga-ion) beam milling (Xe-FIB) for microfabrication on Ni-Mn-Ga magnetic shape memory single crystals. We started with the most basic structures such as micropillars. Xe-FIB working conditions of 30 kV/100 nA results in large curtaining effect thus for micrometre sized structures a two-step milling procedure was used with the final polishing conditions of 30 kV/100 pA. Pillars down to 1 micrometre size were produced; preparation of 10 x 10 micrometres square-base pillar for magnetomechanical testing is illustrated in individual steps. By the combination of mechanical testing and optical microscopy we demonstrate that the Xe-FIB milling does not significantly change the ability of martensite twin boundaries to propagate through the fabricated pillars.