SAW sensors for CO2 detection based on perovskite nanomaterials sensing layer

Konferenz: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
10.04.2019 - 11.04.2019 in Barcelona, Spain

Tagungsband: SmartSystems Integration

Seiten: 4Sprache: EnglischTyp: PDF

Persönliche VDE-Mitglieder erhalten auf diesen Artikel 10% Rabatt

Baracu, Angela; Buiculescu, V.; Mueller, R. (National Institute for R&D in Microtehnologies IMT-Bucharest, Erou Iancu Nicolae Street, 126A, 077190, Bucharest, Romania)
Sfirloaga, P.; Vlazan, P. (Institute for Research and Development in Electrochemistry and Condensed Matter, P. Andronescu Street, No.1, 300224, Timisoara, Romania)
Mitrea, C. (S.C. ECONIRV SRL, 80A "Drmul Sarmas", Sect 1, 13593 Bucharest, Romania & S.C. ROM-QUARTZ S.A, Erou Iancu Nicolae Street, 126A, 077190, Bucharest, Romania)

This paper presents the development of surface acoustic wave sensors for CO2 detection. Our structure was fabricated on quartz substrate using a delay line configuration and uses perovskite nanomaterials as sensitive coating for room temperature gas detection. The phase characteristics of the transmission coefficient S21 for an experimental set of CO2 gas concentrations have been evaluated and we have found that the sensor’s sensitivity was about 4.8 degrees/1000 ppm.