Spectrally tunable microsensor for gas analysis

Konferenz: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
10.04.2019 - 11.04.2019 in Barcelona, Spain

Tagungsband: SmartSystems Integration

Seiten: 4Sprache: EnglischTyp: PDF

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Thronicke, Nicole; Moeller, Christian; Mitrenga, Dennis; Karolewski, Dominik; Klein, Thomas; Neckermann, Kristin; Ortlepp, Hans-Georg; Ortlepp, Thomas (CiS Forschungsinstitut für Mikrosensorik GmbH, Konrad-Zuse-Str. 14, 99099 Erfurt, Germany)
Grewe, Adrian; Sinzinger, Stefan (TU Ilmenau, Institut für Mikro- und Nanotechnologien MacroNano® Fachgebiet Technische Optik, Am Helmholtzring 1, 98693 Ilmenau, Germany)

Target of the introduced development is a miniaturized spectrometer for the analysis of gas mixtures. The motivation behind this approach is a sensor that combines the advantages of low-cost compact gas detectors with those of IR spectrometers, enabling the acquisition of continuous absorption spectra. In the course of ongoing developments, demonstrators of a sensor are modeled to verify the sensor functionality using water vapor and carbon dioxide. However the sensor can be adapted for numerous gases of environmental analysis, process measurement and medical engineering.