Control of a SiC 2.5 MHz resonant full-bridge inverter for inductively driven plasma

Konferenz: PCIM Europe 2019 - International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management
07.05.2019 - 09.05.2019 in Nürnberg, Deutschland

Tagungsband: PCIM Europe 2019

Seiten: 8Sprache: EnglischTyp: PDF

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Simon, Christoph; Eizaguirre, Santiago; Denk, Fabian; Heidinger, Michael; Kling, Rainer; Heering, Wolfgang (Karlsruhe Institute of Technology, Light Technology Institute, Germany)

The electronic ballast of an inductively driven plasma faces a mostly inductive, variable load impedance. The SiC full-bridge inverter uses the inductive behavior to achieve zero-voltage-switching and a switching frequency of 2.5 MHz, at 3.9 kVA and 764W in the plasma. The control is realized on a modern, small TI Piccolo microcontroller with a high-resolution PWM module and compensates for the variable load impedance. We present design and experimental results of a 2.5 MHz inverter for inductively driven plasma without the need for a large FPGA controller.