Evaluation of Multilayer Film Passivation for Enhanced HV-H3TRB Reliability of High Power FRD Modules

Inhalt:
In this paper, the application of multilayer film passivation is explored for high-voltage, high-humidity, high-temperature, reverse bias (HV-H3TRB) reliability of high power FRD modules. 3.3kV high-power FRD modules that are made with different passivation layer configurations have been HV-H3TRB stressed according to ECPE guidelines PSRRA 01 for railway application conditions of 85% humidity, 85 °C temperature, and minimum recommended reverse bias voltage of 1950V. Reverse leakage current is monitored during the tests and the post-test residual blocking voltage are measured. Post-test failure analysis is performed to highlight the mechanisms behind the degradation of the passivation stacks. The modules with an optimized passivation design showed superior results during HV-H3TRB stress test compared to control module with standard passivation and two complex multilayer termination-passivation designs modules consisting of additional capping layers of undoped-oxide/silicon nitride/undoped-oxide on primary passivation layers of field-oxide/SiPOS/silicon nitride.