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1
Authors:
Ito, Ban; Nishide, Daisuke; Matsumoto, Takashi; Katagiri, Masayuki; Saito, Tatsuro; Wada, Makoto; Watanabe, Masahito; Sakuma, Naoshi; Kajita, Akihiro; Sakai, Tadashi
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
2
Authors:
Schlueter, James; Stoeva, Savka; Graham, Maitland; Shi, Tom
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
3
Authors:
Kim, Seongsoo; Kim, Jiyoon; Lee, Changsuk; Jeong, Haedo
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
4
Authors:
Ouerd, Aziz; Dulphy, Hervé; Lelièvre, Vincent; Cioccio, Léa Di; Rivoire, Maurice
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
5
Authors:
Iyer, A.; Yang, T.; Li, T.; Diao, J.; Lee, C. H.; Leung, G.; Osterheld, T.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
6
Authors:
Mei, Hegeng; Wang, Jie; Lu, Xinchun
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
7
Authors:
Kang, Mincheol; Kim, Kyungbo; Jung, Taeyeon; Park, Hyungsoon; Kim, Hyunghwan; Kang, Hyosang
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
8
Authors:
Kim, Hyuk-Min; Manivannan, R.; Moon, Deog-Ju; Kwon, Tae-Young; Noh, Jin-Hyeong; Park, Jin-Goo
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
9
Authors:
Zhao, Dewen; Wang, Tongqing; He, Yongyong; Lu, Xinchun
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
10
Authors:
Mazzone, Giovanni; Gianni, Davide M.; Bano, Giuseppe; Castelletti, Luca
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
11
Authors:
Menk, G.; Dhandapani, S.; Huang, Y.-C.; Wood, B.; Qian, J.; Cherian, B.; Garretson, C.; Osterheld, T.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
12
Authors:
Yu, Qiang; Zhao, Dewen; Li, Hongkai; Qu, Zilian; Qian Zhao; Lu, Xinchun; Meng, Yonggang
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
13
Authors:
Dettoni, F.; Beitia, C.; Euvrard, C.; Morand, Y.; Gaillard, S.; Hinsinger, O.; Bertin, F.; Rivoire, M.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
14
Authors:
Suzuki, Norikazu; Asaba, Masakazu; Hashimoto, Yohei; Shamoto, Eiji
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
15
Authors:
Komarenko, P.; Qian, J.; Salfelder, J.; Levedakis, D.; Economikos, L.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
16
Authors:
Dhandapani, S.; Qian, J.; Cherian, B.; Menk, G.; Garretson, C.; Lee, H.; Bennett, D.; Osterheld, T.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
17
Authors:
Rudolph, C.; Wachsmuth, H.; Bartusseck, I.; Dobritz, S.; Grafe, J.; Boettcher, M.; Wolf, M. J.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
18
Authors:
Robin, O.; Nemouchi, F.; Charrion, E.; Hinsinger, O.; Galpin, D.; Rivoire, M.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
19
Authors:
Dettoni, F.; Beitia, C.; Morand, Y.; Euvrard, C.; Balan, V.; Peak, J.; Gaillard, S.; Hinsinger, O.; Bertin, F.; Rivoire, M.
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
20
Authors:
Lee, Sangjik; Kim, Hyoungjae; Lee, Hyunseop; Jeong, Haedo
Conference:
ICPT 2012 - International Conference on Planarization / CMP Technology
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