1
Adding CNT-based functionality to MEMS: A technology demonstration for strain and IR sensors on wafer scale
Autoren:
Boettger, Simon; Bonitz, Jens; Kini, Mandar; Schulz, Stefan E.; Hermann, Sascha
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
2
Analysis and Simulation of Super-Hydrophobic Layers for Microfluidic Applications
Autoren:
Tuerk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
3
Anwendungen ionenspur-geätzter Polymermembranen in der Mikro-Nano-Integration
Autoren:
Schlaak, H. F.; Wick, K.; Khoury, M. El; Bieker, J.; Quednau, S.
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
4
Combining nanoimprint lithography, electroplating and microstructuring techniques to fabricate 3D nanostructured multielectrode arrays for biological applications
Autoren:
Decker, Dominique; Ingebrandt, Sven; Rabe, Holger; Schaefer, Karl-Herbert; Saumer, Monika
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
5
Combining top-down bottom-up lithographic and galvanic manufacturing techniques for the generation of dynamic and reversible surfaces
Autoren:
Kehagias, N.; Lamprakou, Z.; Guttmann, M.; Winkler, F.; Francone, A.; Fernandez, A.; Chamakos, N. T.; Papathanasiou, A. G.; Sotomayor Torres, C. M.
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
6
Effective conversion processes of metal-oxide precursors for the reduction of the conversion temperature in solution processed metal-oxide thin-film transistors
Autoren:
Bock, Claudia; Subasi, Ersoy; Kasischke, Maren; Pham, Duy-Vu; Xiao, Shizhou; Du, Keming; Ostendorf, Andreas; Kunze, Ulrich
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
7
Electrochemical Deposition of Reactive Material Systems for Assembly and Packaging Applications
Autoren:
Hertel, Silvia; Schulte, Wiebke; Weiser, Mathias; Becker, Mike; Wiemer, Maik; Otto, Thomas
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
8
Fabrication of polymeric micro-optical components with integrated nano-topography for advanced photonic applications
Autoren:
Wolf, J.; Gruetzner, S.; Ferstl, M.; Lawal, J.; Schleunitz, A.; Gruetzner, G.
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
9
Fluorescent E-beam and Photolithographic Resists for Upconversion
Autoren:
Kaiser, Christian; Schirmer, Matthias; Mai, Tobias; Gerngross, Maik; Steglich, Thomas; Kumke, Michael; Steffen, Marita
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
10
Influence of the electrode material on the performance of BTBT-based thin-film transistors
Autoren:
Meyers, Thorsten; Reker, Julia; Petrov, Dmitry; Vidor, Fabio F.; Hilleringmann, Ulrich
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
11
Low power miniaturized tunnel magnetoresistive (TMR) sensors for Industry 4.0 applications
Autoren:
Slatter, Rolf
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
12
Mesoscopic Optics
Autoren:
Kreismann, Jakob; Behrens, Arne; Weigel, Christoph; Sinzinger, Stefan; Hentschel, Martina; Yang, Lan
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
13
New concept for post-CMOS pellistor integration
Autoren:
Muenchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
14
Penetrating nanoelectrodes for an electrical cell interface on CMOS ASIC
Autoren:
Allani, S.; Jupe, A.; Utz, A.; Schaal, C.; Rustom, A.; Kappert, H.; Vogt, H.
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
15
Performance Analysis of CuO Nanoparticle-Based Thin-Film Transistors
Autoren:
Reker, J.; Meyers, T.; Petrov, D.; Vidor, F. F.; Hilleringmann, U.
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
16
Rapid Micro-Nano-Integration of Single Silicon Nanowires in 2D-Sensor Arrays using Automated Software Tools
Autoren:
Roos, Michael M.; Huffert, Thomas; Puchinger, Anouk; Strehle, Steffen
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
17
Thin film ALD materials as functional layer for 3D-integrated metal oxide gas-sensors
Autoren:
Knauss, A. M.; Muenchenberger, F. M.; Dietz, D.; Jupe, A.; Kappert, H.; Vogt, H.
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop
18
Y2O3 sol-gel passivation layer for solution-processed metal-oxide thin-film transistors
Autoren:
Subasi, Ersoy; Boysen, Nils; Mai, Lukas; Pham, Duy-Vu; Bock, Claudia; Devi, Anjana; Kunze, Ulrich
Konferenz:
Mikro-Nano-Integration - 7. GMM-Workshop