Autoren:
Sundermann, Frank; Trouiller, Yorick; Urbani, Jean-Christophe; Couderc, Christophe; Belledent, Jérôme; Borjon, Amandine; Foussadier, Franck; Gardin, Christian; LeCam, Laurent; Rody, Yves; Saied, Mazen; Yesilada, Emek; Martinelli, Catherine; Wilkinson, Bill; Vautrin, Florent; Morgana, Nicolo; Robert, Frederic; Montgomery, Patrick; Kerrien, Gurwan; Planchot, Jonathan; Farys, Vincent; Maria, Jean-Luc Di
Konferenz:
EMLC 2007 - 23rd European Mask and Lithography Conference