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1

Mask CD measurement approach by diffraction intensity for lithography equivalent

Autoren:
Nagai, Takaharu; Mesuda, Kei; Sutou, Takanori; Inazuki, Yuichi; Hashimoto, Hiroyuki; Yokoyama, Toshifumi; Toyama, Nobuhito; Morikawa, Yasutaka; Mohri, Hiroshi; Hayashi, Naoya
Konferenz:
EMLC 2008 - 24th European Mask and Lithography Conference

2

Mask Data Rank (MDR) and its Application

Autoren:
Kato, Kokoro; Endo, Masakazu; Inoue, Tadao; Yamabe, Masaki
Konferenz:
EMLC 2008 - 24th European Mask and Lithography Conference

3

Mask Industry Assessment Trend Analysis

Autoren:
Shelden, Gilbert; Marmillion, Patrica; Hughes, Greg
Konferenz:
EMLC 2008 - 24th European Mask and Lithography Conference

4

Maßnahmen in elektrischen Anlagen zur Minimierung niederfrequenter Magnetfelder

Autoren:
Zschau, Gerd; Gonschorek, Karl-Heinz
Konferenz:
EMV 2008 - Internationale Fachmesse und Kongress für Elektromagnetische Verträglichkeit

5

Material Characterization of Liquid Crystals at THz-Frequencies using a Free Space Measurement Setup

Autoren:
Koeberle, M.; Göbel, T.; Schönherr, D.; Mueller, S.; Jakoby, R.; Meissner, P.; Hartnagel, H.-L.
Konferenz:
GeMIC 2008 - German Microwave Conference

6

May we reach it? Or must we? In what time? With what probability?

Autoren:
Hermanns, Holger; Johr, Sven
Konferenz:
MMB 2008 - 14th GI/ITG Conference - Measurement, Modelling and Evalutation of Computer and Communication Systems

7

Measurement based satellite to outdoor channel modeling for multiple satellite systems

Autoren:
Milojevic, Marko; Haardt, Martin; Heuberger, Albert
Konferenz:
European Wireless 2008 - 14th European Wireless Conference

8

Measurement-Based Modeling of NGN Access Networks from an Application Perspective

Autoren:
Fabini, Joachim; Reichl, Peter; Poropatich, Alexander
Konferenz:
MMB 2008 - 14th GI/ITG Conference - Measurement, Modelling and Evalutation of Computer and Communication Systems

9

Measurements and modeling of multiple reflections effect in building materials for indoor communication systems at THz frequencies

Autoren:
Piesiewicz, R.; Jansen, C.; Koch, M.; Kürner, T.
Konferenz:
GeMIC 2008 - German Microwave Conference

10

Measurements of Multi-Antenna Gains using a 3GPP-LTE Air Interface in Typical Indoor and Outdoor Scenarios

Autoren:
Haustein, T.; Venkatkumar, V.; Eichinger, J.; Schulz, E.; Wirth, T.; Jungnickel, V.; Forck, A.; Wahls, S.; Juchems, C.; Luhn, F.; Zavrtak, R.
Konferenz:
European Wireless 2008 - 14th European Wireless Conference

11

Measuring Contact Hole Corner Rounding Uniformity Using Optical Scatterometry

Autoren:
Lam, John C.; Gray, Alexander; Chen, Stanley; Richter, Jan
Konferenz:
EMLC 2008 - 24th European Mask and Lithography Conference

12

Measuring the cumulative PMD of buried fibers in the network of Deutsche Telekom in a field trial using an RS-POTDR prototype

Autoren:
Fritzsche, D.; Paul, M.; Schuerer, L.; Ehrhardt, A.; Breuer, D.; Weiershausen, W.; Cyr, N.; Chen, H.; Schinn, G. W.
Konferenz:
Photonische Netze - 9. ITG-Fachtagung

13

Mechanische und elektrische Charakterisierung von vertikalen HF Flex-Substrat Interconnects für das 2.5D System in Package Design

Autoren:
Maaß, Uwe; Polityko, David-Dmitry; Richter, Christian; Ndip, Ivan; Hefer, Jan; Guttowski, Stephan; Reichl, Herbert
Konferenz:
Elektronische Baugruppen und Leiterplatten - EBL 2008 - Systemintegration und Zuverlässigkeit - 4. DVS/GMM-Fachtagung

14

Mechanische Untersuchungen zum Vergleich der Haftung an inneren Grenzflächen in syntaktischem Schaum

Autoren:
Strauchs, Anja; Mashkin, Andrey; Schnettler, Armin; Tröger, Alexander
Konferenz:
Grenzflächen in elektrischen Isoliersystemen - 3. ETG-Fachtagung

15

MEDEA+ project 2T302 MUSCLE “Masks through user’s supply chain: leadership by excellence”

Autoren:
Torsy, Andreas; Torsy, Andreas
Konferenz:
EMLC 2008 - 24th European Mask and Lithography Conference

16

Medizintechnik und IT eröffnen die Chancen für neue Prozesse

Autoren:
Bursig, Hans-Peter
Konferenz:
VDE-Kongress 2008 - Zukunftstechnologien: Innovationen - Märkte - Nachwuchs

17

MEMS based inertial measurement unit for attitude and heading reference systems

Autoren:
Bartholomeycz, J.; Zimmermann, S.; Breng, U.; Gutmann, W.; Hafen, M.; Handrich, E.; Huber, M.; Kempfer, U.; Kopmann, H.; Kunz, J.; Leinfelder, P.; Ohmberger, R.; Probst, U.; Ruf, M.; Spahlinger, G.; Rasch, A.; Straub-Kalthoff, J.; Stroda, M.; Stumpf, K.; Weber, C.; Zimmermann, M.; Geiger, W.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

18

MEMS markets and newapplications

Autoren:
Mounier, Eric
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

19

MEMS Package in a Harsh Environment for Aeronautic Applications

Autoren:
Friedberger, Alois; Gradolph, Christian; Klettner, Florian; Müller, Gerhard; Wilde, Jürgen
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

20

MEMS-based spectroscopic ellipsometry

Autoren:
Saupe, Ray; Otto, Thomas; Gruska, Bernd; Weiss, Alexander; Stock, Volker; Gessner, Thomas
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components