MEMS based speakers – sounds good?!

Konferenz: Mikro-Nano-Integration - 8. GMM-Workshop
15.09.2020 - 17.09.2020 in Online

Tagungsband: GMM-Fb. 97: Mikro-Nano-Integration

Seiten: 6Sprache: EnglischTyp: PDF

Beer, Daniel; Kueller, Jan; Zhykhar, Albert; Fritsch, Tobias; Maennchen, Andreas (Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany)
Strehle, Steffen (Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Microsystems Technology Group, Germany)
Knechtel, Roy (Schmalkalden University of Applied Sciences, Autonomous Intelligent Sensors, Chair Carl Zeiss Foundation, Germany)
Boes, Joachim (Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany; Technische Universität Ilmenau, Department of Mechanical Engineering, Industrial Applications of Media Technologies Group, Germany)

Miniaturized speakers have become the central key for multiple fields of audio technology comprising smartphones, hearing aids, and miniaturized headphones, to name only a few. Generally, loudspeakers must be precisely manufactured at high quantity and at relatively low costs and need to be significantly scaled down to reduce the overall size of the devices, their weight, and the overall power consumption. Here, micro- and nanointegration technologies are driving forces, but were ignored for several years for loudspeaker design and assembly. In this paper, we present a critical discussion of MEMS loudspeaker miniaturization based on finite element and electroacoustic simulations, actuation material choices with emphasis on micro- and nanointegration, and production aspects.