Highly thermally conductive and integratable circuit carriers based on anodized aluminum

Konferenz: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
27.10.2025-29.10.2025 in Duisburg, Germany

doi:10.30420/456614002

Tagungsband: MikroSystemTechnik Kongress 2025

Seiten: 3Sprache: EnglischTyp: PDF

Autoren:
Petillon, Simon; Koch, Dominik; Knoeller, Andrea; Kallfass, Ingmar; Eberhardt, Wolfgang; Zimmermann, Andre

Inhalt:
Anodic aluminum oxide is a promising coating material for electronic applications, as it represents an adherent and economically friendly alternative for inorganic insulating layers in high performance electronic substrates, such as insulated metal substrates. Aiming the fabrication of such electronic substrates, two key aspects that must be considered: (i) the robustness against thermomechanical stresses that occur during production as well as operation, and (ii) the possibility to create an adherent selective metallization. A preliminary selection of suitable process parameters regarding anodization was carried out, and a standard metallization process was used for the fabrication of electronic substrates. Thermal stress tests were performed to evaluate these substrates, and a demonstrator was built.