Rubrik: Proceedings - Allgemeine Proceedings

VDE e.V. (Hrsg.)

MikroSystemTechnik Kongress 2025

Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität 27. – 29. Oktober 2025, Duisburg

2025, XXIII, 497 Seiten, 140 x 124 mm, Slimlinebox, CD-Rom
ISBN 978-3-8007-6614-7, E-Book: ISBN 978-3-8007-6615-4
Persönliche VDE-Mitglieder erhalten auf diesen Titel 10% Rabatt

Inhaltsverzeichnis Vorwort

219,00 € CD-Rom 219,00 € E-Book/PDF

Nichts ist so beständig wie der Wandel
Diese Aussage von Heraklit gilt bis heute unverändert. Wandel findet in vielen Bereichen des Lebens und mit immer höherer Geschwindigkeit statt. Es fällt vielen Menschen zunehmend schwer, dem noch zu folgen.
Fortschritt in der Technik begleitet den Wandel in vielen Themen, etwa bei der Digitalisierung, den erneuerbaren Energien oder der Mobilität. Sie helfen uns, auch die globalen Veränderungen durch neue Herausforderungen wie sich ändernde geopolitische Randbedingungen oder den Klimawandel zu bewältigen oder sie zu gestalten.
Mikroelektronik und Mikrosystemtechnik sind Treiber dieses Fortschritts
Ohne Mikroelektronik und Mikrosystemtechnik kommt keine andere industrielle Branche aus. Die Krisen der letzten Jahre haben gezeigt, dass ein sicherer Zugang zu Hardware in der erforderlichen Qualität und Quantität notwendig ist, von der Standard-Elektronik bis hin zu innovativen Ansätzen. In Deutschland und Europa entstehen neue Fertigungskapazitäten und führen auch zu neuen Herausforderungen im Bereich der Fachkräfte-Gewinnung. Leider werden – wie Studien des VDE zeigen – Innovationen eher mit Informatik in Verbindung gebracht, Elektrotechnik gilt bei Schülern und Lehrern als wenig innovativ und wird mit „Strippen ziehen" in Verbindung gebracht. Hier braucht es unser Engagement, um diesen Vorbehalt mit Beispielen zu widerlegen. Wir hoffen, dass der Mikrosystemtechnik-Kongress hierzu einen Beitrag leisten kann und neue Anstöße gibt.

Wir laden ein nach Duisburg
Wir laden Sie herzlich nach Duisburg, den Industriestandort mit den letzten Hochöfen in der Metropole Ruhr ein, in der viele Zukunftstechnologien beheimatet sind. Hier findet nicht zuletzt der Wandel von der durch Kohle geprägten zur nachhaltigen Industrie statt. Im Rahmen der Abendveranstaltung werden wir den Landschaftspark Nord, eine ehemalige Hochofenanlage und Teil der Route Industriekultur, besuchen.
Wir freuen uns auf Ihre Beiträge, die den Wandel durch Fortschritt heute und in Zukunft aufzeigen. Der Kongress ist eine gute Gelegenheit, um mit Kolleginnen und Kollegen ins Gespräch zu kommen, die eigenen Ergebnisse zu präsentieren und neue Impulse mitzunehmen.

Der VDE – Verband der Elektrotechnik Elektronik Informationstechnik e.V. ist einer der großen europäischen Verbände für Branchen und Berufe der Elektro- und Informationstechnik. Eine internationale Experten-Plattform für Wissenschaft, Normung und Produktprüfung – interdisziplinär, eng verflochten, und einmalig auf der Welt. Eine geballte Konzentration an Erfahrung, Marktkenntnissen und technologischem Know-how.

Dieser Tagungsband enthält folgende Beiträge, die Sie einzeln als PDF-Download erwerben können:

Zur erweiterten Tagungsbeitragssuche

Single-photon detection in Ge- & GeSn-on-Si avalanche photodiodes

Autoren: Wanitzek, Maurice; Ramachandra, Harishnarayan; Spieth, Christian; Hack, Michael; Seidel, Lukas; Schaefer, Soeren; Schwarz, Daniel; Daus, Alwin; Oehme, Michael

Highly thermally conductive and integratable circuit carriers based on anodized aluminum

Autoren: Petillon, Simon; Koch, Dominik; Knoeller, Andrea; Kallfass, Ingmar; Eberhardt, Wolfgang; Zimmermann, Andre

Deformation Of A Spherical Droplet Into Fluidic Lens Under EWOD Effect Through A Simulated Perforated Multi Stacked Hydrophobic Microsystem

Autoren: Das, Debatri; Hoffmann, Martin

Influence of composition in sputtered multi-layer cavity enhanced Schottky SWIR photodetectors

Autoren: Augel, Lion; Knobbe, Jens; Shala, Leonor

Application of shifted excitation Raman difference spectroscopy for material identification towards sustainable recycling processes

Autoren: Sowoidnich, Kay; Mueller, Andre; Rudisch, Katharina; Pufahl, Karsten; Regir, Valentin; Sumpf, Bernd; Maiwald, Martin

Smart and ultra-compact hyperspectral camera

Autoren: Knaack, Marcus; Engelke, Heinrich; Jongmanns, Marcel; Devi, Sharda; Jablonski, Ireneusz

Investigation of fractal noise in phase measurement of optical QRNG systems using digital and analog processing methods

Autoren: Narayanan, Bhuvnesh; Firoozi, Mehrzad; Srinivasan, Anandhakrishnan; Kirrbach, Rene; Faulwasser, Michael

Blade Milling For Quantum Computing

Autoren: Gang, Andreas; Junghaehnel, Manuela

Test Rig for the Calibration of Multi-Component Sensors in Three Degrees of Freedom for Drive Monitoring

Autoren: Hehn, Thorsten; Gross, Jan; Zimmermann, Lukas; Willmann, Alexander; Folkmer, Bernd; Schumacher, Axel; Dieter, Christoph; Zizelmann, Christoph; Rietsche, Hansjoerg; Amft, Oliver

Miniaturized Volumetric Dosing System for Automated Nanoliter Precision Dosing of Liquids

Autoren: Zett, Oliver; Strobel, Hanna; Knorr, Agnes; Richter, Martin

Novel Time-Sensitive Networking Testbed for Energy-Efficient, Realtime Connectivity

Autoren: Meissner, Philipp; Kirrbach, Rene; Baer, Frank

Reusable silicon-glass chip for consecutive Polymerase Chain Reaction

Autoren: Funke, Nils; Li, Xiangping

Packaging Technologies For High Frequency Applications Using Polymer Materials

Autoren: Barth, Maximilian; Werum, Kai; Eberhardt, Wolfgang; Fritz, Karl-Peter; Zimmermann, Andre

Novel SiCer based micromechanical imaging radar sensor system

Autoren: Tschoban, C.; Becker, K.-F.; Hommes, A.; Geibig, T.; Yellu, S.; Hillebrand, M.; Kleinholz, C.; Hoffmann, M.; Schneider-Ramelow, M.; Mueller, J.

Energy and CO2 Savings for High-Density Rack Servers Using 1-Stage and 2-Stage 48 V to 1 V PoL Solutions

Autoren: Zeltner, Stefan; Eckardt, Bernd

Towards a Modular 5G Motion Capture Testbed for Indoor UAVs

Autoren: Cortes Martinez, Rolando; Suryawanshi, Abhijeet Sanjay; Ruffert, Christine; Herglotz, Christian; Schiffer, Johannes

Fingerprinting Architecture based on a MEMS Varactor Array for Hardware Security

Autoren: Meinel, Katja; Schott, Christian; Mayer, Franziska; Gupta, Dhruv; Mittag, Sebastian; Hahn, Susann; Weidlich, Sebastian; Buelz, Daniel; Forke, Roman; Hiller, Karla; Heinkel, Ulrich; Kuhn, Harald

Modular 5G-Communication and Radar based Animal Health Monitoring System for Smart Live Stock Farming

Autoren: Brockmann, Carsten; Maass, Uwe; Charan Pasupuleti, Sriram; Yeasmin Usha, Tamanna; Ndip, Ivan; Rotta, Randolf; Karnapke, Reinhardt; Herglotz, Christian; Pearl Doe, Nina; Ulbricht, Markus; Wolpert, Ilonka; Ruffert, Christine; Scholles, Michael

Ein stromgesteuerter 3.3V 6-bit Digital-Analog-Wandler mit organischen Duennfilmtransistoren auf einem flexiblen Polyimid- Substrat

Autoren: Li, Mengyao; Passlack, Ulrike; Edelmann, Kevin; Burghartz, Joachim N.; Yu, Zili

Development and Application of an Ultrasound Camera for Position Tracking of Objects and Individuals

Autoren: Koch, Sandro G.; Jongmanns, Marcel; Monsalve, Jorge M.; Stolz, Michael; Suawa, Priscile; Herglotz, Christian; Holzschuh, Robert; Ruffert, Christine

Novel type of self-priming porous ports for microfluidic applications

Autoren: Lisec, Thomas; Behrmann, Ole; Teja Bodduluri, Mani; Karl, Werner J.; Jagadesh, Nagashree B.; Gojdka, Bjoern

Wafer-Level Design Und Produktion Von Komponenten Fuer Optische Faser- Chip Schnittstellen In KI Rechenzentren

Autoren: Hauschild, Dirk; Noell, Wilfried

Reducing Latency in 5G IIoT Networks Using in-Network Processing

Autoren: Karnapke, Reinhardt; Werban, Phillip; Ruffert, Christine

Electrohydrodynamic Printing of Nanoparticle-Based Silver Inks: A Study Towards Fabrication of Skin-Like Wearable Devices

Autoren: Philippin, Nadine; Kuehne, Ingo; Schrag, Gabriele

ZuSE-KI-mobil Software Development Kit for AI Acceleration

Autoren: Friedrich, Martin; Lueders, Matthias; Renke, Oliver; Weddige, Sousa; Riggers, Christoph; Blume, Holger; Friedrich, Simon; Mojumder, Shaown; Matus, Emil; Fettweis, Gerhard; Ahmadifarsani, Samira; Kontopoulos, Leonidas; Schlichtmann, Ulf; Hoefer, Julian; Schmid, Patrick; Toto-Kiesa, Hella; Becker, Juergen; Kock, Markus; Schewior, Gregor; Blume, Steffen; Grantz, Darius; Benndorf, Jens; Fasfous, Nael; Mori, Pierpaolo; Voegel, Hans-Joerg; Teepe, Gerd; Bierzynski, Kay

Revisiting a Predictive Maintenance Toolbox: Sensor Retrofit and Workflow Demonstration with a Paired Sensor Study

Autoren: Lautsch, Martin Thomas; Abdalla, Khaled M. A. A.; Berger, Ulrich

Infrastructure Concept for Contactless Monitoring of Incontinence Material

Autoren: Gupta, Dhruv; Nagarajan, Sridhar; Schott, Christian; Markert, Erik; Heinkel, Ulrich

Micromechanical counter device with highly advanced cycle count for recording of up to 9900 sterilization events

Autoren: Hoffmann, Daniel; Spieth, Sven; Herrlich, Simon; Erben, Andreas; Pagel, Kenny; Dehe, Alfons

MEMS for preventive Healthcare

Autoren: Serout, Anne; Podbiel, Daniel; Kadic, Samir; Knapp, Michael; Vincent, Heloise

Development of a Microfluidic Chip with Integrated Hydrogel Membranes for Tissue Engineering Applications

Autoren: Ehlers, Lisa Marie; Rennpferdt, Lukas; Trieu, Hoc Khiem

Quantification of Environmental Potentials of Microelectronics Production Processes - Green ICT @ FMD

Autoren: Nissen, Nils F.; Stobbe, Lutz; Groth, Anne; Myndyk, Maksym

Piezoelectric Conversion of Thermomagnetic Energy from Waste Heat

Autoren: Wischnewski, Maxim; Joseph, Joel; Ohtsuka, Makoto; Miki, Hiroyuki; Kohl, Manfred

Industrial Use of Private 5G-Network: Development of a Mobile Demonstrator to Test Network Coverage

Autoren: Levon, Johan; Ruffert, Christine; Herglotz, Christian

5G Campus Networks at Brandenburg University of Technology Cott-bus-Senftenberg

Autoren: Ruffert, Christine; Habel, Kai; Herglotz, Christian

Process development for manufacturing blazed gratings using grayscale lithography

Autoren: Giese, Henning; de Wall, Sascha; Wurz, Marc Christopher

Erfahrungen aus dem Freilandeinsatz einer Blatt-Kuevette

Autoren: Frey, Yasmina; Dumberger, Stefanie; Stock, Clara; Haberstroh, Simon; Werner, Christiane; Wallrabe, Ulrike

Comparison of FTIR and SIFT-MS for the Detection of Climate-relevant Gases in PE-CVD and Plasma Etching Processes in MEMS and Microelectronics Manufacturing

Autoren: Loesel, Maximilian; Schumann, Erik; Dill, Pauline; Mueller, David; Volk, Sebastian

Greener Solvents For Removing Polyimide-based Temporary Bond Adhesive Residues

Autoren: Riffert, Aron; Gang, Andreas; Gueenc, Haci Osman; Junghaehnel, Manuela

MEMS-Based Measurement of the Ion Angle Distribution for Sustainable Semiconductor Dry Etching

Autoren: Melzer, Marcel; Meinel, Katja; Stoeckel, Chris; Hemke, Torben; Mussenbrock, Thomas; Zimmermann, Sven

Monolithically integrated tungsten masses for tuning of the resonance frequency of MEMS

Autoren: Clausen, Niels; Bodduluri, Mani Teja; Lisec, Thomas; Gojdka, Bjoern

Wearable CMUT-Array for Online Monitoring of Blood Flow

Autoren: Voelz, Uwe; Betz, Bjoern; Kircher, Marco; Koeble, Soeren

Biomimetic Nanostructured 3D Microelectrode Systems for Spatially Resolved Electrophysiological Cell Recordings

Autoren: Baumann, Benjamin; Nowduri, Bharat; Jakoby, Michaela; Schulte, Steven; Britz-Grell, Anette; Meyszner, Antoine; Weisgerber, Marie-Claire; Koch, Klaus Peter; Schaefer, Karl-Herbert; Rabe, Holger; Saumer, Monika

Fluid-Acoustic Microchip for Cell Manipulation

Autoren: Leikam, Barbara; Pandey, Shilpi; Hayden, Oliver; Schrag, Gabriele

Towards fast and precise phase-only modulation-based adaptive optics to improve widefield microscopic imaging of scattered objects

Autoren: Bennewitz, Felix; Berndt, Dirk; Kourkoulos, Dimitrios; Darvin, Maxim

Active capsule for sampling intestinal liquid biopsy for microbiome analysis

Autoren: Shahadha, Mohammed Hadi; Gruner, Denise; Voigt, Andreas; Marschner, Uwe; Richter, Andreas; Le Floch, Maxime; Hampe, Jochen; Brauer, Frank; Schostek, Sebastian

Novel Type of Anchoring for Polysilicon-Based Movable Microstructures with Highly Improved Mechanical Resilience

Autoren: Lisec, Thomas; Clausen, Niels; Klingbeil, Finn; Jensen, Bjoern; Dankwort, Torben; Gojdka, Bjoern

AlScN process platform for MEMS actuators with PZT like performance

Autoren: Kreutzer, Tom-Niklas; Stoppel, Fabian; Ghori, Muhammad Zubair; Lofink, Fabian; Fichtner, Simon

Integration und Demonstration der 1T1C FeMFET Speicher- technologie fuer In-Memory-Computing-Anwendungen

Autoren: Seidel, Konrad; Lehninger, David; Suenbuel, Ayse; Hoffmann, Raik; Revello, Ricardo; Yadav, Nandakishor; Vardar, Alptekin; Maehne, Hannes; Bernert, Kerstin; Thiem, Steffen; Barbot, Justine; Kaempfe, Thomas; Lederer, Maximilian

On-chip Refractive Index Sensors in 200 mm Wafer Silicon Technology

Autoren: Berkmann, Fritz; Reiter, Sebastian; Senguel, Akant; Mai, Christian; Chavarin, Carlos Alvarado; Wenger, Christian; Fischer, Inga Anita

Variability Reduction in RRAM through Device Stack Engineering

Autoren: Bende, Ankit; Paul, Godwin; Solfronk, Oliver; Hoffmann-Eifert, Susanne; Dittmann, Regina; Rana, Vikas

Zentrifugale Mikrofluidik-Array-Technologie (CM-ArT) fuer schnelle und hochparallele Pikoliter-Partitionierung

Autoren: Heyer, Marvin; Murad, Salman; Lickert, Fabian; Gmoser, Helena; Hutzenlaub, Tobias; Paust, Nils; Juelg, Peter

A Finite Element Study of Electrode Configurations and Geometries for Electrostatic Stray Field Actuators

Autoren: Schuetz, Arwed; Hoffmann, Martin; Bechtold, Tamara

MULTISTABILER MAGNETISCHER HUBAKTOR OHNE BIEGEBALKEN FUER GROSSE VERTIKALE AUSLENKUNGEN

Autoren: Weber, Pascal M.; Wallrabe, Ulrike

Motion Primitive Based Predictive Control of a Rotational Actuator Driven by Contact and Friction

Autoren: Olbrich, Michael; Mueller, Christopher; Laun, Joshua; Ament, Christoph

3D printed HASEL platform using the effect of phase transition

Autoren: Hubracht, Andreas; Thelemann, Albert; Jiao, Chen; Tripathi, Ashwani Sharan; Marschner, Uwe; Richter, Andreas; Vorrath, E.-F. Markus; Maas, Juergen

Microstructuring and Fine Tuning of Glass- And Silicon Nitride-Based Microsystems by Focused Electron-beam Irradiation

Autoren: Weigel, Christoph; Holz, Mathias; Strehle, Steffen

Versatile integrable reflective coatings on micro-mirror arrays for VIS and NIR spectral range

Autoren: Mohammad, Qaid; Franze, Peter; Lei, Long; Navarro Fuentes, Maria Esperanza; Ntokap Nguemegne, Ghislain; Doering, Sebastian

Development of Technological Building Blocks for Heterogeneously Integrated sub-THz RF Sensors

Autoren: Maass, Uwe; Ndip, Ivan; Gaebler, Alexander; Kaule, Evelyne; Heinrich, Wolfgang; Krozer, Viktor; Tschammer, Paul; Suetbas, Batuhan; Ertuetk, Volkan; Hasan, Raqibul

Methods for Post-CMOS Integration of Micro-Electronics and -Photonics

Autoren: Westhues, Marcus; Patel, Megha; Burkard, Roman; Geruschke, Thomas; Hauser, Julia; Nesic, Aleksandar; Schall-Giesecke, Anna Lena

Enhancing the Applicability of Femtosecond Laser Written Wave-guides in Fused Silica

Autoren: Rennpferdt, Lukas; Bohne, Sven; Trieu, Hoc Khiem

Fiber Optrode with Microstructured Tips for Precise Light Delivery in Optogenetic

Autoren: Hohlfeld, Dennis; Petrovic, Jelena

Quasi-Monolithic Integration (QMI) Enables New Possibilities for Sensor and MEMS Applications

Autoren: Lorenz, Lukas; Herrmann, Andreas; Goeckeritz, Jenny; Eritt, Michael; Amelung, Joerg

Rapid Gas-Triggered Printing of Stone and Stone-like Materials

Autoren: Xin, Chenxing; Tisato, Silvio; Goralczyk, Andreas; Rapp, Bastian E.

Bottom-up strategy to develop ultrathin active layers by atomic layer deposition for room temperature hydrogen sensors

Autoren: Morales, Carlos; Tschammer, Rudi; Guttmann, Dominic; Henkel, Karsten; Flege, Jan Ingo; Alvarado, Carlos; Wenger, Christian

Robust Waterproofing for Sensor Systems: A Two-Component Enclosure for Reliable Monitoring harsh Environments

Autoren: Bruening, Johannes; Luetkenhorst, Lisa; Huenten, Vanessa; Lange, Niklas; Schlueter, Michael

3D-Printing of Sustainable Polymer-Matrix-Composites

Autoren: Hanemann, T.; Huebschen, M.; Liebig, W.; Noetze, D.; Qazzazie-Hauser, A.

MOVPE growth of lattice matched GaxIn(1-x)AsyP(1-y) for heterojunction bipolar transistors in 6G applications

Autoren: Possberg, Alexander; Abts, Jonathan; van Essen, Fabian; Watermann, Jonas; Mueller, Konrad; Zhang, Hao; Ebbert, Jan; Liborius, Lisa; Weimann, Nils

Parameteroptimierung modengekoppelter Diodenlaser zur Zwei-Photonen Polymerisation

Autoren: Surkamp, Nils; Behlau, Felix; Wohlfeil, Shulin; Knigge, Andrea; Esen, Cemal; Ostendorf, Andreas; Hofmann, Martin R.

Reduction of NF3 consumption during the cleaning of a PECVD cham-ber

Autoren: Hesse, Anne

Anchoring Hollow Nanoneedles in a Free-Standing Plate for Integration in a Microfluidic System

Autoren: Brechmann, Noah; Seidl, Karsten

Fortschritte bei der Prozessgeschwindigkeit von diodenlaserbasierter Zwei-Photonen-Polymerisation

Autoren: Behlau, Felix; Surkamp, Nils; Hofmann, Martin R.; Esen, Cemal; Ostendorf, Andreas; Wohlfeil, Shulin; Knigge, Andrea

Utilizing irregular microlens arrays for compact far-field beam shaping

Autoren: Leitel, Robert; Kundu, Rohan; Stefanidi, Dmitrii

Passive Mask Charge Control for Improved Reactive Ion Etching of Silicate Glasses

Autoren: Bhardwaj, Anant; Wedrich, Karin; Brokmann, Ulrike; Strehle, Steffen; Weigel, Christoph

Manufacturing process of 10 nm SiNx membranes for solid-state nanopore sensing

Autoren: Leibold, Anja; Blattert, Christoph; Gutsch, Sebastian; Dehe, Alfons

Creation of biomimetic structures in functional glasses from biological surfaces by combining nanoimprinting and reactive ion etching

Autoren: Nuesslein, Jakob; Weigel, Christoph; Mondal, Sagnik; Strehle, Steffen

A glass-based MEMS switch approach for harsh environments and high-performance RF applications

Autoren: Schudak, Svenja; Bertke, Maik; Heinz, Jannis B.

Sophisticated 3D Patterning by E-Beam and i-line Grayscale Lithography and followed RIE and DRIE structure transfer to enable future photonic, NEMS and MEMS application fields

Autoren: Schermer, Sebastian; Helke, Christian; Gottwald, Markus; Kohlschreiber, Pia; Bonitz, Jens; Haase, Micha; Umlauf, Georg; Hiller, Karla; Reuter, Danny

On the combination of pyrolysis and plasma to create Parylene C thin films

Autoren: Schober, Konstanze; Meyer, Niklas; Koldehoff, Jasmin; Brandt, Julia; Trieu, Hoc Khiem

Substitution of N-Methyl-2-pyrrolidone (NMP) for Semiconductor Technologies

Autoren: Bornhorst, Kirstin; Al-Falahi, Falah Qasem Ali; Drabe, Christian; Lu, Zhiqiu; Navarro Fuentes, Maria Esperanza; Wagner, Maximilian

Realization and Mounting of Additively Manufactured 3D Structures on Diced Microsystem Chips using Material Jetting

Autoren: Hauck, Lukas; Knechtel, Roy

Review on ceramic multilayer circuit carriers for monolithic sensor integration

Autoren: Bartsch, Heike; Nessimian, Norayr; Kaltwasser, Mahsa; Mueller, Jens

Improved visualization and understanding of complex microsystems through 3D-printed haptic models.

Autoren: Knechtel, Roy; Wenig, Micaela; Hauck, Lukas

Fabrication-Compatible Photonic Structures for Ultra-Wide Visible Light Beam Shaping via Meta-Gratings

Autoren: Wang, Zhen; Theobald, Dominik; Tritschler, Patrick; Lemmer, Uli

Numerical Modeling of Polarization Vortex Evolution in Strained Ferroelectrics

Autoren: Degen, Marvin; Jandieri, Vakhtang; Svejda, Jan Taro; Erni, Daniel

Modeling and extraction of residual stresses in MEMS multilayer systems

Autoren: Long, Li; Long, Frank; Schwartz, Bernhard; Brokmann, Geert; Ortlepp, Thomas

Liquid Characterization Using A Dielectric Slot Waveguide And Machine Learning For Sensing In The Terahertz Regime

Autoren: Das, Paulami; Dausien, Kristof; Burfeindt, Marcel Alver; Schmitt, Lisa; Rolfes, Ilona; Barowski, Jan; Hoffmann, Martin

Software Toolbox for Intelligent Energy Management and System Optimization

Autoren: Beck, Tobias; Lange, Christopher; Ruess, Alexandra

TiN Nanogap Electrodes for DNA Nanoelectronics and Computing: Fabrication and Characterization

Autoren: Abedin, Saadman; Reich, Peggy; Bartsch, Heike; Pezoldt, Joerg

Success models from the competence centre for resource-conscious information and communication technology – "Green ICT @ FMD"

Autoren: Thesen, Manuel; Adu, Lotta; Walter, Hans; Ceren Aslan, Tugana; Huebler, Daniela

Demonstration of Low Power and Multifunctional Neurons with Only a Few Ferroelectric Transistors

Autoren: Grenmyr, Andreas; Zhang, Jiayuan; Moto, Kenta; Sun, Jingxuan; Sakib, Nazmus; Gruetzmacher, Detlev; Knoch, Joachim; Zhao, Qing-Tai

Development of a Robust and Highly Precise Process for Sub-100 nm T-gates

Autoren: Zhang, Hao; Becker, Jing; Haeuser, Patrick; Kahilogullari, Tekin; Liborius, Lisa; Ritter, Daniel; Michels, Thomas; Weimann, Nils

Novel 3d Fabrication Method for Micro-Flame Ionization Detectors

Autoren: Bohne, Sven; Lienerth, Peter; Trieu, Hoc Khiem

Efficient Condition Monitoring with Si-DMS and RFID Technology: An Autonomous RF-based Surface-Mountable Measurement System

Autoren: Frank, Thomas; Hermann, Stefan; Gruen, Andre; Kermann, Manuel; Hintz, Michael; Cyriax, Andrea; Ettrich, Klaus; Peitsch, Peter; Kahl, Sebastian

Multi-band Plasmonic Metamaterial Absorbers for Multispectral Microbolometers

Autoren: Litke, Alexander; Ewering, Johannes; Dittrich, Dirk; Dreiner, Stefan; Weyers, Sascha; Schall-Giesecke, Anna Lena

Optimized Si-DMS: Reducing Thermal Effects for More Accurate Measurements

Autoren: Frank, Thomas; Pobering, Sebastian; Hermann, Stefan; Gruen, Andre; Kermann, Manuel; Hintz, Michael; Cyriax, Andrea

Optimization of Charge Transfer on Fluorinated Polymers towards Efficient Sustainable Energy Harvesters: Triboelectric Nanogenerators (TENGs)

Autoren: Dreher, Franziska; Van Patten, Breezy; Ul Hassan, Tayyeb; Balzer, Bizan N.; Goralczyk, Andreas; Rapp, Bastian E.

Comparison of piezoresistive, capacitive and optical pressure sensors for consumer electronics

Autoren: Kreutzer, Joachim F.; Block, Thomas; Kehrberg, Steven

Piezoelectrically driven MEMS cantilever-based sensors for gas detection

Autoren: Meyer, Jana Marie; Blohm, Lars; Buriks, Manuel; Eisermann, Christian; Nsubuga, Lawrence; Marcondes, Tatiana Lisboa; de Oliveria Hansen, Roana; Lofink, Fabian

Prestructured PEEK Substrates – New Degrees of Freedom for Sensor Applications

Autoren: Fischer, Eike Christian; Bengsch, Sebastian; Werner, Michael

100

3D-integrated post-CMOS pressure sensor for medical applications

Autoren: Maas, Rahel-Manuela; Haenel, Kathrin; Haase, Nina; Albert, Andreas; Figge, Martin; Seidl, Karsten

101

A novel Optocoupler Technology for Gbit/s Data Rates and high Isolation Voltages in the kV-Range

Autoren: Schmieder, Kai; Schneider, Tobias; Kirrbach, Rene

102

Strategies for Wavelength-Selective Ge Photodetectors in 200 mm Wafer Silicon Technology

Autoren: Augel, Lion; Reiter, Sebastian; Senguel, Akant; Mai, Christian; Chavarin, Carlos Alvarado; Oleynik, Paul; Berkmann, Fritz; Wenger, Christian; Fischer, Inga Anita

103

Efficient Thermal Tuning of Silicon Ring Resonators Based on Thermo-Optic Effect

Autoren: Alhareeb, Nadeem K.; Haydar, Ahmad; Vermeer, Matthias L.; Trieu, Hoc Khiem; Lipka, Timo

104

A compact catadioptric multi-channel LWIR camera with a large field of view

Autoren: Leitel, Robert; Karl, Johanna Klara; Oberdoerster, Alexander; Kleinle, Sylke

105

Effects of temperature and light on CeO2/SnO2 thin-film hydrogen sensors

Autoren: Mudundi, Amrutha; Kalra, Amanpreet; Tschammer, Rudi; Morales, Carlos; Flege, Jan Ingo; Fischer, Inga Anita; Chavarin, Carlos Alvarado; Wenger, Christian

106

Ion-Sensitive Field-Effect Transistors for Potassium Sensing

Autoren: Kühne, L. T.; Wambold, M.; Beale, C.; Al-Falahi, F.; Kurth, E.; Hild, O. R.; Ruffert, C.

107

Ultra-Low Frequency Acoustic-Flux Sensor for Efficient Gas Sensing

Autoren: Gupta, Akash; Bittner, Achim; Dehe, Alfons

108

AMR current sensor with monolithically integrated bias magnets

Autoren: Gojdka, Bjoern; Clausen, Niels; Glenske, Claudia; Hille, Pascal; Becker, Laurin; Paul, Johannes; Bodduluri, Mani Teja; Lisec, Thomas

109

Modeling of Piezoelectric Bistable MEMS

Autoren: Platz, Daniel; Fabian, Johannes; Schmid, Ulrich

110

3D-Integration process for back side illuminated image sensors

Autoren: Zeidler, Christopher; Jung, Melanie; Jimenez, Lucia Del Rosario Alcala; Figge, Martin

111

Compact Benchtop Device for Molecular Vapor Deposition of Self-Assembled Monolayers Used in Nanoimprint Lithography

Autoren: Henkel, Marvin; Handte, Thomas; Bohm, Sebastian; Krech, Johannes; Dittrich, Lars; Strehle, Steffen

112

Towards phase-change contacts in PEALD grown molybdenum disulfide via intercalation by focused-ion beam

Autoren: Kruener, Marvin; Becher, Malte Jonas Marius Julian; Nadzeyka, Achim; Kahl, Michael; Ostendorf, Andreas

113

Study on the Thermal Stability of Monolithically Integrated PowderMEMS(r) Magnets for Microelectronic Components

Autoren: Gojdka, Bjoern; Bodduluri, Mani Teja; Zierold, Robert; Hoeppner, Tina; Blick, Robert H.; Lisec, Thomas

114

Development of Crystallized Thick, Highly Doped a-Si:H Layers for Surface Micromachining of MEMS

Autoren: Zhang, Yimei; Quenzer, Hans-Joachim; Jensen, Bjoern; Zollondz, Jens-Hendrik; Müller-Groeling, Axel

115

Wafer-scale atomic layer etching of Al2O3 and 2D-MoS2 grown by plasma-enhanced atomic layer deposition

Autoren: Vogel, Leander; Becher, Malte J.M.J.; Plate, Paul; Ostendorf, Andreas; Bock, Claudia

116

Mechanischer „Operationsverstärker“ mit elektrostatischer Anti- Feder

Autoren: Schmitt, Philip; Schmitt, Lisa; Hoffmann, Martin

117

Innovative High-Temperature Ceramic Coatings via Inkjet printing of polysilazane/MoSi2 Inks

Autoren: Qazzazie-Hauser, A.; Kraemer, J.; Honnef, K.; Hanemann, T.

118

Gruenden eines MEMS-Start-ups: Von der Forschung zum Produkt

Autoren: Schmitt, Philip; Schmitt, Lisa; Wittemeier, Steffen; Mays, Henning; Fernandez-Ortega, Juanita; Hoffmann, Martin

119

Miniaturized Lagrangian Sensor-Systems for Position Detection in (Bio-)Chemical Reactors

Autoren: Gelaeschus, Anton; Haack, Marcel; von Sulecki, Julius; Trieu, Hoc Khiem

120

Development of a system for nanoscale tip-based 3D material deposition from the gas phase

Autoren: Krech, Johannes; Holz, Mathias; Reuter, Christoph; Strehle, Steffen

121

Equivalent Circuit Simulation-based Design of a Chemo-fluidic Analog/Digital Flash-Converter (ADC)

Autoren: Marschner, Uwe; Voigt, Andreas; Richter, Andreas

122

Artificial Intelligence & Software Enablers for Modern Microsensor Systems

Autoren: Hartmann, Bastian; Tritschler, Patrick; Wenzel, Matthias; Degenfeld-Schonburg, Peter

123

Vision of the APECS Pilot Line

Autoren: Guttowski, Stephan; Toepper, Michael; Grimm, Andreas

124

Advanced Heterogeneous System Integration of Chiplets and Quasi-Monolithic Integration

Autoren: Jung, Erik; Toepper, Michael; Mensing, Michael; Roscher, Frank; Hefer, Jan; Mai, Andreas; Becker, Karl Friedrich; Schneider-Ramelow, Martin; Ganesh, Ulrike

125

System-Technology-Co-Optimisation: The Heterogeneous Design Methodology in the APECS Pilot Line

Autoren: Prautsch, Benjamin; Herzer, Elmar; Mensing, Michael; Kuenzel, Petra; Dietz, Marco; Luedecke, Andre; Boerma, Hendrik; Hopsch, Fabian

126

Characterization, testing & reliability for heterogeneous integration of chiplets

Autoren: Kriesten, Daniel; Poellmann, Norbert; Wecker, Julia; Schroeder, Dominik; Brand, Sebastian; Benndorf, Christopher; Strieter, Emanuele; Kabakci, Nisha Jacob; Kurth, Steffen; Altmann, Frank

127

Investigating the Controllability of Corrugated Piezoelectric MEMS Microphones

Autoren: Friebe, Til; Lenz, Maximilian; Ahrens, Henning; Bretthauer, Christian; Schrag, Gabriele

128

Advanced Packaging solutions for HPC, Communication and sensor modules enabled by APECS pilot line

Autoren: Jordan, Rafael; Herzer, Elmar; Mensing, Michael; Moehrle, Martin; Schroeder, Henning; Dietz, Marco; Toepper, Michael

129

Development of a VO2/Si Optical Modulator with Co-Integrated Mi-cro Heater

Autoren: Li, Danni; Li, Zixiong; Fortmann, Jill; Ludwig, Alfred; Kohl, Manfred

130

Utilizing RF-Chiplets For A Reconfigurable Automotive Radar System-In-Package

Autoren: Stadler, Pascal; Geissler, Christian; Fromme, Philipp; Comak, Yasin; Pohl, Nils; T. Braun, Tobias

131

RISC-V Based System on Chip for Wearable Speckle Plethysmography

Autoren: Nolting, Stephan; Rolfes, Carsten

132

Electrical Droplet Position Feedback System for a Digital Microfluidic Platform

Autoren: Wagner, Jan; Schliep, Aron; Schnakenberg, Uwe

133

A Modular Pointing and Tracking System for Terrestrial Quantum Key Distribution

Autoren: Stephan, Mira; Schneider, Tobias; Klingmann, Fabian; Kirrbach, Rene

134

Steep slope cryogenic CMOS devices for quantum computing

Autoren: Zhao, Qing-Tai; Han, Yi; Sun, Jingxuan; Gruetzmacher, Detlev; Knoch, Joachim

135

Design, Simulation, and Fabrication of a MEMS-Based Electrostatic Microactuator for Precise Spherical Rotation

Autoren: Sudhahar, Dwarakesh; Hoffmann, Martin

136

MEMS tunable high-quality resonators for the THz range

Autoren: Schmitt, Lisa; van der Herten, Jannis; Sanchez Pastor, Jesus; Jimenez-Saez, Alejandro; Hoffmann, Martin

137

Switchable Microvalve for High-Pressure Applications

Autoren: Venegas-Rojas, Daybith

138

Optimized assembly of a CMOS-integrated strain sensor for high-precision deformation measurements

Autoren: Schumacher, Axel; Maveya, Ume; Hehn, Thorsten; Knappmann, Stephan; Rietsche, Hansjoerg; Dehe, Alfons

139

Validation of Synthesis Routes for Ferroelectric Barium Strontium Titanate for Potential Applications in Microsystem Technology

Autoren: Honnef, Kirsten; Ade, Martin; Cimen, Emine; Ketterer, Ines; Schoenfelder, Julia; Hanemann, Thomas

140

Electrical and Fluidic Relations in a Piezoelectric Micro Diaphragm Pump

Autoren: Zimmermann, Anne; Richter, Martin; Fischer, Georg

141

Elektrostatischer Kammaktor fuer kombinierte Translation und Rotation

Autoren: Hillebrand, Marius; Hoffmann, Martin

142

Optimization and characterization of a miniaturized piezoelectric inchworm actuator for large force/ stroke applications in implants

Autoren: Mueller, Sonja; Khosravi, Jahangir; Azarhoushang, Bahman; Mescheder, Ulrich

143

Concept and system aspects of MEMS magnetically tunable THz-filters based on metasurfaces

Autoren: Kondamarri, P.; Petit, J.; Kovacs, A.; Herbko, M.; Maciusowicz, M.; Szymanik, B.; Psuj, G.; Lopato, P.; Mescheder, U.

144

Control-oriented modeling and experimental investigation of a spherical cap dielectric elastomer actuator

Autoren: Thelemann, Albert; Hubracht, Andreas; Jiao, Chen; Tripathi, Ashwani Sharan; Marschner, Uwe; Richter, Andreas; Vorrath, E.−F.Markus; Maas, Juergen

145

Design of a Dielectric Waveguide Switch in High-Resistivity Silicon for THz Applications

Autoren: Burfeindt, Marcel Alver; Das, Paulami; Schmitt, Lisa; Hoffmann, Martin

146

Bolometer Sensors For Nuclear Fusion Devices

Autoren: Schaefer, S.; Schmitt, S.; Detemple, P.; Ingesson, L.C.; Penzel, F.; Meister, H.

147

Changes in molybdenum disilicide heating layers in miniaturized infra-red emitting devices caused by long term current stressing

Autoren: Baldauf, Julia; Mistry, Shimoni H.; Thronicke, Nicole; Schildhauer, Toni; Winzer, Andreas; Ortlepp, Thomas

148

Towards Wafer-Level Integration of Photonic Ultrasound Sensors in a SOI Platform

Autoren: Fuenning, Tabea; Manganelli, Costanza L.; Mai, Christian; Peczek, Anna; Kroh, Aleksandra; Villringer, Claus; Skibitzki, Oliver; Paul, Martin; Thomsen, Florian; Schumann, Christoph; Mai, Andreas; Steglich, Patrick