Novel Type of Anchoring for Polysilicon-Based Movable Microstructures with Highly Improved Mechanical Resilience
Konferenz: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
27.10.2025-29.10.2025 in Duisburg, Germany
doi:10.30420/456614046
Tagungsband: MikroSystemTechnik Kongress 2025
Seiten: 3Sprache: EnglischTyp: PDF
Autoren:
Lisec, Thomas; Clausen, Niels; Klingbeil, Finn; Jensen, Bjoern; Dankwort, Torben; Gojdka, Bjoern
Inhalt:
This paper presents a novel anchoring für polysilicon-based movable microstructures which significantly improves the mechanical resilience of MEMS. The concept is modelled using FEM simulation and experimentally validated. Test devices containing movable microstructures realized with the novel anchoring withstand 3 times higher mechanical loads compared to identical test devices with an anchoring corresponding to the state of the art.