Enhancing the Applicability of Femtosecond Laser Written Wave-guides in Fused Silica
Konferenz: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
27.10.2025-29.10.2025 in Duisburg, Germany
doi:10.30420/456614060
Tagungsband: MikroSystemTechnik Kongress 2025
Seiten: 3Sprache: EnglischTyp: PDF
Autoren:
Rennpferdt, Lukas; Bohne, Sven; Trieu, Hoc Khiem
Inhalt:
Femtosecond laser structuring of transparent materials is becoming increasingly relevant and useful due to its ability to pattern 3D structures, especially when Micro-Electro-Mechanical-Systems (MEMS) are getting more complex. Similarly, the possibility of integrating waveguides into transparent materials increases the potential of this technology and can further enhance the complexity of manufactured systems. This paper examines femtosecond laser written (FLW) waveguides and identifies challenges in their applicability. In addition, strategies and approaches for enhancing the applicability of waveguides are explored.

