Multi-band Plasmonic Metamaterial Absorbers for Multispectral Microbolometers

Inhalt:
In this work, multi-band plasmonic metamaterial absorbers (PMA) composed of metal-insulator-metal (MIM) stacks are investigated. The absorbers are designed for multispectral imaging in the mid-wavelength infrared and long-wavelength infrared with uncooled microbolometers. Fourier transform infrared spectroscopy measurements and numerical simulations reveal absorption characteristics, suggesting that stacked configurations consisting of several MIM stacks can be viewed as a superposition of standard MIM-PMA spectra. The choice of materials, deposition methods and patterning processes is suitable for the integration into the existing Fraunhofer IMS’s nanotube microbolometer technology. The fabrication process is CMOS-compatible and carried out on 200 mm-wafers.