Study on the Thermal Stability of Monolithically Integrated PowderMEMS(r) Magnets for Microelectronic Components

Inhalt:
The PowderMEMS(r) microfabrication technique has been proposed and demonstrated for the integration of NdFeB micromagnets on wafer level into MEMS and microelectronic components. This study assesses the suitability of such magnets for application at elevated and cryogenic temperatures in the range between 5 K and 400 K. The results indicate the robustness of the magnets against high temperature gradients and extended heating at 400 K in air. Noticeably, the remanent magnetization Br monotonously increases with decreasing temperature, resulting in Br,5K=1.2·Br,300K.