Artificial Intelligence & Software Enablers for Modern Microsensor Systems

Inhalt:
The success of modern microsensors such as MEMS sensors is based on a vast variety of different enablers. Among these a modern and interesting category of enabling factors are artificial intelligence (AI) and software (SW) enablers, since this group constitutes the connection between micro-electromechanical hardware technology and software & data engineering solutions. In this publication we discuss possible use-cases and scope of AI and SW enablers for the development of modern microsensor systems. As a demonstration for the significance of these enablers we provide two examples with different approaches: The first one is MEMS design optimization by means of structure optimization and the second one is the usage of edge AI for on-chip post processing in order to improve the sensor quality and performance with respect to quantities such as the offsets of a MEMS inertial measurement unit (IMU).