MEMS tunable high-quality resonators for the THz range

Inhalt:
This work focuses on the development of a frequency-tuneable high-Q resonator in the THz range for indoor localization. The system consists of two cavities with different resonance frequencies, one of which is mechanically shifted by an electrostatic actuator to precisely control the frequency difference. A capacitive measurement structure enables accurate detection of this displacement. The design incorporates measures for electromagnetic shielding. After fabrication, the system's functionality will be experimentally verified and compared with simulations.