Bolometer Sensors For Nuclear Fusion Devices
Konferenz: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
27.10.2025-29.10.2025 in Duisburg, Germany
doi:10.30420/456614146
Tagungsband: MikroSystemTechnik Kongress 2025
Seiten: 4Sprache: EnglischTyp: PDF
Autoren:
Schaefer, S.; Schmitt, S.; Detemple, P.; Ingesson, L.C.; Penzel, F.; Meister, H.
Inhalt:
Nuclear fusion devices pose challenging requirements on all involved materials. Bolometer sensors are specifically designed to monitor and measure the plasma radiation distribution in the vacuum vessel. We summarize the evolutionary road of the materials and designs that have been implemented for bolometer sensors for this specific task. We present the current bolometer sensor layout and show that it meets the requirements of the ITER fusion device regarding temperature resilience, radiation hardness and temporal resolution. Our expertise and MEMS technology portfolio also allows for tailoring the device characteristics by applying additional thin film layers, e.g. for heat conduction or anti-reflection purposes which is of interest for application in active and upcoming fusion experiments.

