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1

MEMS markets and newapplications

Autoren:
Mounier, Eric
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

2

MEMS Package in a Harsh Environment for Aeronautic Applications

Autoren:
Friedberger, Alois; Gradolph, Christian; Klettner, Florian; Müller, Gerhard; Wilde, Jürgen
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

3

MEMS-based spectroscopic ellipsometry

Autoren:
Saupe, Ray; Otto, Thomas; Gruska, Bernd; Weiss, Alexander; Stock, Volker; Gessner, Thomas
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

4

MICRO Machining Technologies for Non Silicon Materials

Autoren:
Baum, Mario; Rota, Astrid; Sal, Natalie; Otto, Thomas; Gessner, Thomas
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

5

Micro/nano integration of organic/inorganic hybrid nanostructures on the basis of molecular self-assembly and dielectrophoresis

Autoren:
Csáki, Andrea
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

6

Microcantilever-based sensor array tor amine detection in agro-tood applications

Autoren:
Adami, Andrea; Decarli, Massimiliano; Lorenzelli, Leandro; Guarnieri, Vittorio; Malfatti, Mattia; Apetrei, Constantin; Mendez, Maria Luz Rodriguez
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

7

Microsecurity and Nanosecurity – Security Research Using the Advantages of Smart System Integration

Autoren:
Michel, Bernd; Winkler, Thomas
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

8

Microsystems Engineering Solutions for Inductive Components with High Ampacity

Autoren:
Kallenbach, Matthias; Mühlke, Christian; Hoffmann, Martin
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

9

MiniMags – Microtechnical Challenges Miniaturizing Electro-Magnetic Valves

Autoren:
Dittrich, Lars; Kallenbach, Matthias; Hoffmann, Martin
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

10

Minimizing the impact of fabrication tolerance on embedded filters

Autoren:
Fotheringham, Gerhard; Maaß, Uwe; Ndip, Ivan; Reichl, Herbert
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

11

Monolithic integration of MEMS resonators in a 0.35µm CMOS technology for gravimetric sensor and radiofrequency applications

Autoren:
Abadal, Gabriel; Teva, Jordi; Verd, Jaume; Torres, Francesc; López, Joan Lluis; Uranga, Arantxa; Esteve, Jaume; Pérez-Murano, Francesc; Barniol, Núria
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

12

Multimedia SIM card testing

Autoren:
Laqli, Rachid
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

13

New High Resolution Optical Incremental Rotary Encoder

Autoren:
Mayer, V.; Schneider, M.; Seybold, J.; Botzelmann, T.; Fritz, K.-P.; Kück, H.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

14

Novel Stress Measurement System for Evaluation of Package Induced Stress

Autoren:
Kittel, Hartmut; Endler, Stefan; Osterwinter, Heinz; Oesterle, Sonja; Schindler-Saefkow, Florian
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

15

Novel test structures for stiction characterization by adhesion force measurement

Autoren:
Friedrich, Thomas; Raudzis, Carsten; Müller-Fiedler, Roland; Bagdahn, Jörg
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

16

Optoelectronic Sensors based on OLED-on-CMOS

Autoren:
Vogel, Uwe; Kreye, Daniel; Reckziegel, Sven; Grüger, Heinrich; Pügner, Tino; Törker, Michael; Amelung, Jörg; Scholles, Michael
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

17

Package Induced Stress Simulation and Experimental Verification

Autoren:
Schindler-Saefkow, Florian; Wittler, Olaf; Schreier-Alt, Thomas; Kittel, Hartmut; Michel, Bernd
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

18

Planarity Optimization of Spatial Light Modulators

Autoren:
Duerr, Peter; Wolschke, Steffen; Ludewig, Thomas; Dauderstädt, Ulrike; Kunze, Detlef; Wagner, Michael; Lakner, Hubert
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

19

Presentation of Platforms for Wireless Advanced Networks of Sensors for aeronautics application

Autoren:
Moreau, Katell; Rouet, Vincent
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

20

Printing of UHF modulators on embedded silicon in semi-passive RFID

Autoren:
Nilsson, H-E.; Mattsson, C. G.; Sidén, J.; Geyer, U.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components