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IEC 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Ausgabedatum: 2016-01
Edition: 2.0
Sprache: EN-FR - zweisprachig englisch/französisch
Seitenzahl: 66 VDE-Artnr.: 222493

Inhaltsverzeichnis

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.