IEC 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Ausgabedatum:
2016-01
Edition:
2.0
Sprache: EN-FR - zweisprachig englisch/französisch
Seitenzahl: 66 VDE-Artnr.: 222493
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.