IEC 62047-32:2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
Ausgabedatum:
2019-01
Edition:
1.0
Sprache: EN-FR - zweisprachig englisch/französisch
Seitenzahl: 37 VDE-Artnr.: 247101
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.