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1

?omplete set of the special process equipment for the defect-free production of reticles

Authors:
Avakaw, Syarhei; Iouditski, Valerian; Pushkin, Leanid; Tsitko, Alena
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

2

A Cost Model Comparing Image Qualification Using Test Wafer and Direct Mask Inspection

Authors:
Bhattacharyya, Kaustuve; Hazari, Viral; Sutherland, Doug; Higashiki, Tatsuhiko
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

3

A novel model building flow for the simulation of proximity effects of mask processes

Authors:
Mas, Jonathan; Mittermeier, Engelbert
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

4

Accelerating Physical Verification Using STPRL: a Novel Language for Test Pattern Generation

Authors:
Nouh, Ahmed
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

5

Achieving Mask Order Processing Automation, Interoperability and Standardization based on P10

Authors:
Rodriguez, B.; Filies, O.; Sadran, D.; Tissier, Michel; Albin, D.; Stavroulakis, S.; Voyiatzis, E.
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

6

Actinic inspection of sub-50 nm EUV mask blank defects

Authors:
Lin, Jingquan; Weber, Nils; Maul, Jochen; Rott, Karsten; Hendel, Stefan; Merkel, Michael; Schoenhense, Gerd; Kleineberg, Ulf
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

7

Aerial Imaging Performance of ALTA4700 Printed Mask for 130nm Design Rule

Authors:
Hsu, Jyh Wei; Wu, Chun Hung; Cheng, Kevin
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

8

An Empirical Approach Addressing the Transfer of Mask Placement Errors During Exposure

Authors:
Alles, B.; Simeon, B.; Cotte, E.; Wandel, T.; Schulz, B.; Seltmann, R.
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

9

Assessment of EUV reticle blank availability enabling the use of EUV tools today and in the future

Authors:
Jonckheere, R.; Lorusso, G. F.; Goethals, A.; Ronse, K.; Hermans, J.; Ruyter, R. De
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

10

Benchmark and gap analysis of current mask carriers vs future requirements: example of the carrier contamination

Authors:
Fontaine, H.; Davenet, M.; Cheung, D.; Hoellein, I.; Richsteiger, P.; Dejaune, P.; Torsy, A.
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

11

Birefringence variation of quartz substrates during mask process

Authors:
Morikawa, Yasutaka; Kitahata, Yasuhisa; Yokoyama, Toshifumi; Yokoyama, Toshifumi; Kikuchi, Toshiharu; Kawaguchi, Atsushi; Ohkubo, Yasushi
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

12

Calibration of CD mask standards for the 65 nm node: CoG and MoSi

Authors:
Richter, J.; Heins, T.; Liebe, R.; Bodermann, B.; Diener, A.; Bergmann, D.; Frase, C. G.; Bosse, H.
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

13

Challenges of residual layer minimisation in thermal nanoimprint lithography

Authors:
Bogdanski, Nicolas; Wissen, Matthias; Möllenbeck, Saskia; Scheer, Hella-Christin
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

14

Characteristics optimization of mask materials for Hyper-NA lithography

Authors:
Morikawa, Yasutaka; Suto, Takanori; Nagai, Takaharu; Inazuki, Yuichi; Adachi, Takashi; Kitahata, Yasuhisa; Yokoyama, Toshifumi; Toyama, Nobuhito; Mohri, Hiroshi; Hayashi, Naoya
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

15

Characterization of photo masks by X3D AFM

Authors:
Froeck, C.; Ho, M.
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

16

Contact angles and liquid loss behavior of high index fluids

Authors:
Harder, Paul M.; Shedd, Timothy A.
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

17

Current status of water immersion lithography and prospect of higher index method

Authors:
Owa, Soichi; Nakano, Katsushi; Nagasaka, Hiroyuki; Kohno, Hirotaka; Ohmura, Yasuhiro; McCallum, Martin
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

18

Damage free megasonic resonance cleaning for the 45nm design rule

Authors:
Osbome, Steve; Baudiquez, Valentine; Rode, Thomas; Chovino, Christian; Takahashi, Hidekazu; Woster, Eric
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

19

Data Preparation for EBDW

Authors:
Thrum, Frank; Kretz, Johannes; Lutz, Tarek; Keil, Katja; Arndt, Christian; Choi, Kang-Hoon; Baetz, Ullrich; Belic, Nikola; Lemke, Melchior; Denker, Ulrich; Gramss, Juergen; Kliem, Karl-Heinz
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference

20

Effects of heat curing on adhesive strength between microsized SU-8 and Si substrate

Authors:
Ishiyama, C.; Sone, M.; Higo, Y.
Conference:
EMLC 2007 - 23rd European Mask and Lithography Conference