1
Integrated Profile Control from ECP to CMP
Authors:
Stöckgen, Uwe; Wehner, Susanne; Preuße, Axel; Heinrich, Jens; Groschopf, Johannes
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
2
Integrative Defect Density Reduction at STI CMP
Authors:
Becker, Ralf; Tittes, Wolfgang; Boenicke, Andreas; Peters, Stefan; Probst, Marc; Schulze, Daniel; Cwikla, Sebastian; Loesch, Stefan
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
3
Large particle counting for quality control of CMP slurries
Authors:
Nogowski, A.; Stintz, M.; Barthel, H.
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
4
Laser Scattering Technique for Characterizing Defects and Surface Morphology in the Fixed Abrasive CMP Process
Authors:
Mahajan, Uday; Zhang, Haiping; Douglas, Carlotte; Gagliardi, John; Olson, Erik
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
5
Major Influences of Shaping and Profiling of Cu ECP and CMP on Feature Level
Authors:
Marxsen, Gerd; Merbeth, Thomas; Nopper, Markus; Ortleb, Thomas; Lehr, Matthias U.; Roessler, Thomas
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
6
Material & Design Considerations for Zero Defect CMP Pads7
Authors:
Carpio, R.; Tolic, F.; Hymes, S.; Bajaj, R.
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
7
Materials Challenges in Planarization and Interconnect Technologies
Authors:
Moinpour, Mansour
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
8
Modeling for pad wear control during conditioning in CMP
Authors:
Kasai, Toshi; Anjur, Sriram; Siriwardane, Haresh; Feeney, Paul
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
9
New Polish Chemistry and Process for Improved Fixed Abrasive CMP Performance
Authors:
Menk, G.; Marks, R.; Leung, G.; Iyer, A.; Diao, J.; Zhou, Y.; Lee, C.
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
10
Next Generation Barrier CMP technology for 45nm and beyond
Authors:
Ye, Qianqiu Christine; Li, Hugh
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
11
Next Generation Chemical Mechanical Planarization Slurries for Polishing Silicon on Advanced Devices
Authors:
White, Michael L.; Nam, Chul Woo; Batllo, Francois; Walters, Alicia
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
12
Novel slurries for achieving a low silicon dioxide and high silicon nitride removal during chemical-mechanical planarization
Authors:
Natarajan, A.; Veera, Dandu; Babu, S. V.; Babu, S. V.
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
13
Optimization of post polish procedure with respect to defect density reduction in oxide CMP processes
Authors:
Lauber, Heike; Münzberger, Sven
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
14
Optimized and Customized CMP Conditioner Design for Next Generation Oxide/Metal CMP
Authors:
Hwang, Taewook; Baldoni, Gary; Vedantham, Rama; Puthanangady, Thomas
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
15
Oxide Thickness Profile Measurement by Dispersive White-Light Interferometry in CMP Process
Authors:
Jeong, Haedo; Park, Boumyoung; Kim, Youngjin; Kim, Hyoungjae; Ghim, Young-Sik; You, Joonho; Kim, Seung-Woo
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
16
Pad Roughness Effects on Removal Rate and Selectivity in a STI Ceria CMP Process
Authors:
Meyer, Frank C.; Kuo, Chi-Hsiang; Rudolph, Catharina; Faustmann, Peter
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
17
Pad Surface Analysis and Conditioning Effects: Implications on Process Design, Break-in Response and Next Generation Pad and Conditioning Platforms
Authors:
Lawing, Andrew Scott; Juras, Chris
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
18
Pad SurfaceMicrostructure and Optimization of the Conditioning Sweep
Authors:
Borucki, L.; Wei, X.; Zhuang, Y.; Zhuang, Y.; Philipossian, A.; Philipossian, A.; Slutz, D.
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
19
Planarization of the Poly-Si gate for Non Volatile Memories
Authors:
Baud, L.; Canevari, L.; Romanelli, C.; Spinolo, G.; Rivoire, M.
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology
20
Point of Use Quality Control of CMP Slurries
Authors:
Hinze, Frank; Altmann, Justus
Conference:
ICPT 2007 - International Conference on Planarization / CMP Technology