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21

Changes in the MEMS industry 2007 - 2012

Autoren:
Wicht, Henning; Bouchaud, Jérémie
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

22

Closed Loop Controlled Liquid Dosing System

Autoren:
Götz, Martin; Ashauer, Matthias; Storz, Matthias; Kleiser, Michael; Zengerle, Roland
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

23

COB vs. Flip Chip - A technology and cost comparison based on a real product

Autoren:
Kloeser, Joachim
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

24

Complex Miniaturized Analysis System for Nuclear Magnetic Resonance Spectroscopy of Nanoliter Amounts of Biological Sample Material

Autoren:
Leidich, S.; Riemer, T.; Braun, M.; Kurth, S.; Gessner, T.; Gessner, T.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

25

Cost-Driven Design of Smart Micro Systems

Autoren:
Niedermayer, Michael; Hefer, Jan; Reichl, Herbert; Guttowski, Stephan
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

26

Design and Implementation ot a Micro Structure Printer tor Rapid Prototyping ot Microimplantable Medical Devices

Autoren:
Kraaijeveld, Leander; Schwarz, Markus
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

27

Development and Characterization of Platinum Thin Films for Gas Analysis Microsystem

Autoren:
Dow, Ali Badar Alamin; Sklorz, Adam; Benecke, Wolfgang; Lang, Walter
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

28

Development of a piston type condenser microphone for reconfigurable acoustic arrays

Autoren:
Calaza, Carlos
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

29

Efficient Wireless powering of single-chip systems

Autoren:
Baldi, Antonio; Segura-Quijano, Fredy; García-Canton, Jesús; Sacristán, Jordi; Oses, Ma Teresa
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

30

Electromagnetic inertial microgenerators for vibrational energy scavenging: Implementation of a Si technology based modular process for optimised devices

Autoren:
Fondevilla, Núria; Serre, Christophe; Martínez, Susanna; Pérez-Rodríguez, Alejandro; Morante, Joan Ramón; Martincic, Emile; Montserrat, Josep; Jaume Esteve
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

31

Electron beam machining of microsystem products

Autoren:
Tanasie, Gheorghe; Böhm, Stefan; Bärtle, Jan; Löwer, Thorsten; Reiter, Andrea; Franzkowiak, Michael; Reinhart, Gunther
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

32

European Research in Micro-Nano-Technology and Systems: Opportunities in Framework Programe 7

Autoren:
Albuquerque, Augusto de
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

33

Evaluation of a low cost piezorresistive material for high resolution tactile sensors

Autoren:
Castellanos, Julián; Navas-González, Rafael; Ochoteco, Estíbalitz; Vidal-Verdú, Fernando
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

34

Fabrication and characterization of a passive silicon-based direct methanol fuel cell

Autoren:
Sabate, N.; Esquivel, J. P.; Santander, J.; Torres, N.; Gràcia, I.; Ivanov, P.; Fonseca, L.; Figueras, E.; Cané, C.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

35

Fabrication of a Low-Frequency Ultrasonic Transducer

Autoren:
Jia, Chenping; Wiemer, Maik; Hiller, Karla; Otto, Thomas; Gessner, Thomas; Gessner, Thomas
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

36

Fabrication of nanomechanical sensors monolithically integrated on CMOS by full wafer nanostencil lithography

Autoren:
Arcamone, Julien; Boogaart, Marc A F van den; Serra-Graells, Francesc; Fraxedas, Jordi; Brugger, Jürgen; Pérez-Murano, Francesc
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

37

From MEMS to Smart Systems Integration

Autoren:
Finkbeiner, Stefan
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

38

From MST components to Smart System: example of IMU

Autoren:
Bouchaud, Jérémie; Dixon, Richard
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

39

From the flexible / rigid-flexible circuit board solution to the mechatronic 3D unit

Autoren:
Bäcker, Dirk
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

40

Fully-Integrated wireless CMOS smart sensor

Autoren:
Segura-Quijano, Fredy; Sacristán, Jordi; García-Canton, Jesús; Oses, Teresa; Baldi, Antonio
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components