1
3D micro-machined inductive suspensions with the lowest energy consumption
Autoren:
Poletkin, Kirill; Lu, Z.; Moazenzadeh, Ali; Korvink, Jan Gerrit; Wallrabe, Ulrike; Badilita, Vlad
Konferenz:
MikroSystemTechnik 2017 - Kongress
2
3D Optical Microresonators: Laser-Assisted Fabrication and Packaging
Autoren:
Zamora, Vanessa; Herter, Jonas; Janeczka, Christian; Schroeder, Henning
Konferenz:
MikroSystemTechnik 2017 - Kongress
3
3D Structuring of Silicon using Grayscale Technology
Autoren:
Muthiah, Uma; Khazi, Isman; Mescheder, Ulrich
Konferenz:
MikroSystemTechnik 2017 - Kongress
4
A New Approach for In-Line Heat Chuck Temperature Measurement Based on SAW Technology
Autoren:
Lenzhofer, Martin; Stocksreiter, Wolfgang; Szirch, Stefan
Konferenz:
MikroSystemTechnik 2017 - Kongress
5
A replaceable bioreactor array for monitoring mold spore contamination in archives
Autoren:
Vinayaka, Poornachandra Papireddy; Blank, Roland; Frodl, Mathias; Tahir, Muhammad Waseem; Zaidi, Nayyer Abbas; Oellers, Martin; Driesche, Sander van den; Lang, Walter; Vellekoop, Michael J.
Konferenz:
MikroSystemTechnik 2017 - Kongress
6
A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Autoren:
Walk, Christian; Goertz, Michael; Mokwa, Wilfried; Vogt, Holger
Konferenz:
MikroSystemTechnik 2017 - Kongress
7
An integrated electronic circuit for decentralized monitoring of Lithium-ion battery cells
Autoren:
Saidani, Fida; Hutter, Franz X.; Selinger, Wilhelm; Roessler, Stefan; Braunwarth, Wolfgang; Burghartz, Joachim
Konferenz:
MikroSystemTechnik 2017 - Kongress
8
Automated particle based C-reactive protein immunoassay with ondisk pre-stored reagents and centrifugo-pneumatic liquid control
Autoren:
Zhao, Yunpeng; Klein, Vanessa; Mitsakakis, Konstantinos; Czilwik, Gregor; Zengerle, Roland; Paust, Nils
Konferenz:
MikroSystemTechnik 2017 - Kongress
9
BiCMOS Embedded Microfluidic Technology Based on Wafer Bonding Techniques for Biosensor Applications
Autoren:
Inac, Mesut; Wietstruck, Matthias; Goeritz, Alexander; Cetindogan, Barbaros; Baristiran-Kaynak, Canan; Marschmeyer, Steffen; Fraschke, Mirko; Voss, Thomas; Mai, Andreas; Palego, Cristiano; Pothier, Arnaud; Kaynak, Mehmet
Konferenz:
MikroSystemTechnik 2017 - Kongress
10
BiCMOS Embedded RF-MEMS Technologies
Autoren:
Tolunay Wipf, Selin; Göritz, Alexander; Wietstruck, Matthias; Wipf, Christian; Kaynak, Mehmet
Konferenz:
MikroSystemTechnik 2017 - Kongress
11
Customized micro mirror array for highly parallel industrial laser direct processing on the micro- and nanoscale
Autoren:
Schmidt, Jan-Uwe; Duerr, Peter; Wagner, Michael
Konferenz:
MikroSystemTechnik 2017 - Kongress
12
Design of a thermoelectric generator for electrical active implants
Autoren:
Jadhav, Onkar Sandip; Yuan, Cheng Dong; Hohlfeld, Dennis; Bechtold, Tamara
Konferenz:
MikroSystemTechnik 2017 - Kongress
13
Development and performance analysis of an energy-autonomous VHF-beacon for animal-tracking
Autoren:
Baeumker, Eiko; Schuele, Florian; Woias, Peter
Konferenz:
MikroSystemTechnik 2017 - Kongress
14
Development of an Extended Gate Field Effect Transistor (EGFET) based low-cost pH-sensor
Autoren:
Mokhtarifar, Naser; Goldschmidtboeing, Frank; Woias, Peter
Konferenz:
MikroSystemTechnik 2017 - Kongress
15
Digital Twins at the Crossroad of Production, Product and Technology
Autoren:
Funk, Klaus; Reinhart, Gunther
Konferenz:
MikroSystemTechnik 2017 - Kongress
16
Dynamic fluorescence measurements on DNA microarrays in foil-based microfluidics using multichannel Silicon Photomultipliers.
Autoren:
Ohlander, Anna; Seb, Andrej; Bose, Indranil; Ganka, Thomas; Wiest, Florian; Kutter, Christoph
Konferenz:
MikroSystemTechnik 2017 - Kongress
17
Fabrication Advances for Microfluidic Cryofixation
Autoren:
Fuest, Marie; Nocera, Giovanni M.; Modena, Mario M.; Burg, Thomas P.
Konferenz:
MikroSystemTechnik 2017 - Kongress
18
Frequency tunable piezoelectric energy harvester with segmented electrodes for improved power generation
Autoren:
Bouhedma, Sofiane; Hohlfeld, Dennis
Konferenz:
MikroSystemTechnik 2017 - Kongress
19
High aspect ratio silver nanowires for flexible conductive networks with high optical transparency as electrodes for mechanical actuators
Autoren:
Schierle, Stefan; Woias, Peter; Goldschmidtboeing, Frank
Konferenz:
MikroSystemTechnik 2017 - Kongress
20
High Intensity UV-LED Mask Aligner for Applications in Industrial Research
Autoren:
Schindler, Katrin; Leischner, Ulrich; Lopper, Christina; Striebel, Thomas; Kaiser, Paul; Schoembs, Ulrike
Konferenz:
MikroSystemTechnik 2017 - Kongress