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1

3D Wafer Level System Integration – Requirements & Technologies

Autoren:
Klumpp, A.; Wolf, M. J.; Ramm, P.; Wunderle, B.; Reichl, H.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

2

802.15.4 Wireless Sensor Network

Autoren:
Maglione, Alfredo; Battisti, Nicola
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

3

A 5-bit K-Band MEMS Phase Shifter in a 1-Level Plastic Package

Autoren:
Bastioli, S.; Maggio, F. Di; Farinelli, P.; Giacomozzi, F.; Margesin, B.; Ocera, A.; Pomona, I.; Russo, M.; Sorrentino, R.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

4

A Miniaturized Atmospheric Dielectric Barrier Discharge (DBD) Plasma System for Mass Spectrometry Analysis of Biosamples

Autoren:
Yang, Chao-Chi; Shiea, Jen-Taie; Lin, Che-Hsin
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

5

A Multilayer Process for the Connection of Fine-Pitch-Elements on Three-Dimensionally Molded Interconnect Devices (3D-MIDs)

Autoren:
Leneke, Thomas; Majcherek, Soeren; Hirsch, Soeren; Schmidt, Bertram
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

6

A NEMS array for a signal to noise ratio improvement and mechanical filter design

Autoren:
Kharrat, Chady; Colinet, Eric; Voda, Alina
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

7

A new method for wafer level integration of silicon components on LTCC

Autoren:
Bartsch de Torres, H.; Fischer, M.; Gade, R.; Mach, M.; Müller, J.; Hoffmann, M.; Pawlowski, B.; Barth, S.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

8

A readout circuit for remote interrogation of capacitance transducers

Autoren:
Nowak, Michel; Delorme, Nicolas; Colinet, Eric; Jacquemod, Gilles; Conseil, François
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

9

A Smartsystem based on a Lab on a Card for detection of Salmonella spp. In faeces

Autoren:
Agirregabiria, M.; Olabarria, G.; Verdoy, L.; Tijero, M.; Berganzo, J.; Fernandez, L. J.; Mayora, K.; Ruano-López, J. M.
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

10

Achievements and perspectives of the DRIE technology for the Microsystems

Autoren:
Puech, M.; Thevenoud, J. M.; Gruffat, J. M.; Launay, N.; Godinat, P.; Barillec, O. Le
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

11

Advanced Adhesives based on Carbon Nanotube Technology

Autoren:
Fecht, Hans-Jörg; Leson, Andreas; Michel, Bernd; Werner, Matthias
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

12

An all-polymer microfluidic system for protein sensing applications with integrated low-cost pumps, surface modification and sealing

Autoren:
Nestler, Joerg; Hiller, Karla; Gessner, Thomas; Gavillet, Jérôme; Auerswald, Janko; Knapp, Helmut; Griffiths, Christian; Bigot, Samuel; Beckers, Marie-Claire
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

13

An electromagnetic energy harvester for low frequency excitation

Autoren:
Hohlfeld, Dennis; Vullers, Ruud; Boeck, Jo de
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

14

Analysis of Thermomechanical Stress in Bare Die Assemblies on Polymer Substrates

Autoren:
Majcherek, Soeren; Leneke, Thomas; Hirsch, Soeren; Schmidt, Bertram
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

15

Application of high-resolution X-ray microscopy to image backend-of- line structures

Autoren:
Zschech, Ehrenfried; Braun, Stefan; Yun, Wenbing
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

16

Application of Higher Order Sensitivity FE Method for Parametric MEMS Design

Autoren:
Kolchuzhin, Vladimir; Doetzel, Wolfram; Mehner, Jan
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

17

Approaches of local stress measurement on microsystem devices

Autoren:
Vogel, Dietmar; Auerswald, Ellen; Gollhardt, Astrid; Luczak, Falk; Sabate, Neus; Michel, Bernd
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

18

Batch Fabrication Methods for Active Polymer Microsystems

Autoren:
Grund, Thomas; Kohl, Manfred
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

19

Broadband Parameters of Compact FT Spectrometer based on Fabry-Perot Interferometer Integrated with Detector

Autoren:
Manuilskiy, Anatoliy; Andersson, Henrik; Thungström, Göran; Nilsson, Hans-Erik
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

20

Calibration in a MEMS based measurement system or how to make a sensor-ASIC loop of high resolution work

Autoren:
Vosskaemper, L. M.; Domingues, Christian; Engels, Lucille; Sibeud, Loïc
Konferenz:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components