1
Assembly of MEMS-based devices by reactive bonding
Autoren:
Schumacher, Axel; Knappmann, Stephan; Dietrich, Georg; Pflug, Erik
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
2
Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilever for nanoparticle detection
Autoren:
Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Marks, Markus; Wasisto, Hutomo Suryo; Peiner, Erwin
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
3
Centrifugation of micro particles and self-assembly of nano particles by capillary bridging for 3D thermal interconnects
Autoren:
Hofmann, Christian; Baum, Mario; Wang, Wei-Shan; Wiemer, Maik
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
4
Development of a low temperature SiC protection layer for post-CMOS MEMS fabrication utilizing vapour release technologies
Autoren:
Walk, Christian; Chen, Yizhou; Vidovic, Nino; Kuhl, Andreas; Goertz, Michael; Vogt, Holger
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
5
Digital Microfluidics for Microchip-Based Cell Sorting
Autoren:
Kahnert, S.; Schreiber, F.; Goehlich, A.; Greifendorf, D.; Lennartz, K.; Kirstein, U.; Bartels, F.; Janzyk, U.; Rennings, A.; Erni, D.; Kueppers, R.; Vogt, H.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
6
Direct Integration of Field Effect Transistors as Electro Mechanical Transducer for Stress on Beam Structures
Autoren:
Haas, S.; Hafez, N.; Loebel, K.-H.; Koegel, E.; Ramsbeck, M.; Reuter, D.; Horstmann, J. T.; Gessner, T.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
7
Gas measurement system for indoor air quality monitoring using an integrated pre-concentrator gas sensor system
Autoren:
Leidinger, Martin; Reimringer, Wolfhard; Alepee, Christine; Rieger, Max; Sauerwald, Tilman; Conrad, Thorsten; Schuetze, Andreas
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
8
High Performance Center Functional Integration in Micro- and Nanoelectronics - Overview about the innovations and the research network and the offer to the industry
Autoren:
Herre, Konrad
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
9
High-precision thermal diode for single-point calibration and the calibration-free temperature measurement in the range from 3 K to 500 K
Autoren:
Tobehn, Ingo; Pause, Saskia; Ortlepp, Thomas
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
10
Highly ordered silicon nanopillar by nanoparticle lithography
Autoren:
Hamdana, Gerry; Bertke, Maik; Südkamp, Tobias; Bracht, Hartmut; Wasisto, Hutomo Suryo; Peiner, Erwin
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
11
In-situ plasma etch depth control with reflectance anisotropy spectroscopy (RAS)
Autoren:
Doering, Christoph; Kleinschmidt, Ann-Katrin; Barzen, Lars; Fouckhardt, Henning; Wahl, Michael; Kopnarski, Michael
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
12
Influence of low-pressure plasma treatment on the adhesion strength vacuum-produced metal-plastic composites using the example of polyamide 46 and polyamide 6
Autoren:
Florian, Tamara; Artys, Tatjana; Brunotte, Gabriella Paula; Rami, Julia; Ziegmann, Gerhard
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
13
Influence of Traps on the Characteristics of ZnO Nanoparticles Thin-Film Transistors
Autoren:
Vidor, Fabio F.; Meyers, Thorsten; Wirth, Gilson I.; Hilleringmann, Ulrich
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
14
Integration of Nanochannels for Lab-on-Chip-Systems
Autoren:
Khoury, Mario El; Quednau, Sebastian; Duznovic, Ivana; Ensinger, Wolfgang; Schlaak, Helmut. F.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
15
Integration of wet-etched GaN nanowires for vertical power transistors
Autoren:
Yu, Feng; Yao, Shengbo; Roemer, Friedhard; Witzigmann, Bernd; Wasisto, Hutomo Suryo; Waag, Andreas
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
16
Low temperature catalytic combustible hydrogen MEMS gas sensor enhanced by Si-Pt nanostructures
Autoren:
Mueller, Lutz; Hoffmann, Martin; Maier, Konrad; Helwig, Andreas; Müller, Gerhard
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
17
Making use of synthetic diamond layers for 3d micro- and nanoelectronic applications
Autoren:
Baehr, Mario; Klein, Thomas; Taeschner, Robert; Ortlepp, Thomas
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
18
Measurement chamber for optical in-situ concentration measurements in dispersive liquids
Autoren:
Blech, Michael; Cyriax, Andrea; Frank, Thomas; Freitag, Hans-Joachim; Pobering, Sebastian; Wünscher, Heike; Ortlepp, Thomas
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
19
Microstructured Metal Layers in Dye Sensitized Solar Cells
Autoren:
Kleine, Andre; Hilleringmann, Ulrich
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
20
Modeling and compensating thermal drift in time divergent AFM measurements
Autoren:
Krauskopf, J. E.; Bartenwerfer, M.; Fatikow, S.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop